@inproceedings{SchelsEdlerHanschetal., author = {Schels, Andreas and Edler, Simon and Hansch, Walter and Bachmann, Michael and Herdl, Florian and Dusberg, F. and Eder, Magdalena and Meyer, Manuel and Dudek, M. and Pahlke, Andreas and Schreiner, Rupert}, title = {Current dependent performance test used on different types of silicon field emitter arrays}, series = {2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France}, booktitle = {2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France}, editor = {Purcell, Stephen and Mazellier, Jean-Paul}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-6654-2589-6}, doi = {10.1109/IVNC52431.2021.9600787}, pages = {1 -- 2}, abstract = {A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduced by slightly varying the original fabrication process [1]. The comparison shows superiority of tip like emitters over blade like structures.}, language = {en} }