@article{PeterHolsteynsDalmeretal., author = {Peter, Daniel and Holsteyns, Frank and Dalmer, Michael and Kruwinus, Hans and Lechner, Alfred and Bensch, Wolfgang}, title = {A Study on the Structure Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing}, series = {ECS Meeting Abstracts}, volume = {MA2009-02}, journal = {ECS Meeting Abstracts}, number = {24}, publisher = {IOP Science}, doi = {10.1149/MA2009-02/24/2084}, language = {en} }