@inproceedings{ZhouLandgrafRuecketal., author = {Zhou, Qi and Landgraf, Ferdinand and R{\"u}ck, Thomas and Bierl, Rudolf}, title = {Resonance frequency tuning and process design of a micromechanical capacitive cantilever in a photoacoustic trace-gas sensing device}, series = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, booktitle = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, publisher = {VDE-Verlag}, address = {Berlin}, isbn = {978-3-8007-4491-6}, abstract = {Photoacoustic spectroscopy is an efficient method to detect the concentration of trace gases with following advantages: short response time, high sensitivity, continuous and real-time monitoring and the option of miniaturization without the need of complex mirror-based multi-pass cell designs. A micromechanical cantilever is used as a key component in a two-part "Cantilever-Resonator" system that detects the weak photoacoustic signal. The resonance frequency of cantilever needs to be tuned to match the resonance frequency of resonator in order to achieve the maximum vibration amplitude of the "Cantilever-Resonator" system. This paper reports a post-fabrication method to tune the resonance frequency of cantilevers via focused ion beam (FIB) and a capacitive solution for the cantilever to transform the acoustic signal to electrical signal.}, language = {en} } @article{ZaglerLandgrafRuecketal., author = {Zagler, Andreas and Landgraf, Ferdinand and R{\"u}ck, Thomas and Bierl, Rudolf}, title = {Entwicklung eines mikromechanischen kapazitiven Schalldetektors im resonanten Betrieb f{\"u}r die photoakustische Spurengasanalyse}, series = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, journal = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, publisher = {VDE-Verlag}, address = {Berlin}, language = {de} } @techreport{UngerRueckLandgrafetal., author = {Unger, J. and R{\"u}ck, Thomas and Landgraf, Ferdinand and Bierl, Rudolf}, title = {Herstellung und Analyse der Resonanzfrequenz eines MEMS Cantilever f{\"u}r das CEPAS Verfahren}, abstract = {Diese Abhandlung beschreibt das Konzept eines mikroeletromechanischen Systems (MEMS), das im Messverfahren der cantilever enhanced photoacoustic spectroscopy (CEPAS) Verwendung finden soll. Es wird die Herstellung eines einseitig eingespannten Biegebalkens aus Silizium mittels deep reactiv ion etching (DRIE) beschrieben. Des Weiteren wird die Resonanzfrequenz dieses Cantilevers mit Hilfe Laservibrometertechnik untersucht. Die resultierenden resonanten Schwingungen 0.Ordnung werden mit den Ergebnissen einer vereinfachten theoretischen N{\"a}herung verglichen. Die Messergebnisse stehen in gutem Zusammenhang mit den theoretischen Werten. Solche Cantilever, die aus silicon on insula tor (SOI) Wafer angefertigt wurden, weisen bei einer Zielfrequenz ein mittlere Abweichung von Δf = 118±26Hz (bzw.Δf =0,76±0,17\%) auf.}, language = {de} } @inproceedings{RueckLandgrafLaeppleetal., author = {R{\"u}ck, Thomas and Landgraf, Ferdinand and L{\"a}pple, I. and Unger, J. and Matysik, Frank-Michael and Bierl, Rudolf}, title = {Specification of an improved photoacoustic setup for high-sensitive, low-cost NO2 trace gas detection}, series = {18th International Conference on Photoacoustic and Photothermal Phenomena (ICPPP18), 2015, September 6-10, Novi Sad, Serbia}, booktitle = {18th International Conference on Photoacoustic and Photothermal Phenomena (ICPPP18), 2015, September 6-10, Novi Sad, Serbia}, language = {en} }