@misc{ScharfenbergMottokArtmannetal., author = {Scharfenberg, Georg and Mottok, J{\"u}rgen and Artmann, Christina and Hobelsberger, Martin and Paric, Ivan and Großmann, Benjamin and Pohlt, Clemens and Wackerbarth, Alena and Pausch, Uli and Heidrich, Christiane and Fadanelli, Martin and Elsner, Michael and P{\"o}cher, Daniel and Pittroff, Lenz and Beer, Stefan and Br{\"u}ckl, Oliver and Haslbeck, Matthias and Sterner, Michael and Thema, Martin and Muggenthaler, Nicole and Lenck, Thorsten and G{\"o}tz, Philipp and Eckert, Fabian and Deubzer, Michael and Stingl, Armin and Simsek, Erol and Kr{\"a}mer, Stefan and Großmann, Benjamin and Schlegl, Thomas and Niedersteiner, Sascha and Berlehner, Thomas and Joblin, Mitchell and Mauerer, Wolfgang and Apel, Sven and Siegmund, Janet and Riehle, Dirk and Weber, Joachim and Palm, Christoph and Zobel, Martin and Al-Falouji, Ghassan and Prestel, Dietmar and Scharfenberg, Georg and Mandl, Roland and Deinzer, Arnulf and Halang, W. and Margraf-Stiksrud, Jutta and Sick, Bernhard and Deinzer, Renate and Scherzinger, Stefanie and Klettke, Meike and St{\"o}rl, Uta and Wiech, Katharina and Kubata, Christoph and Sindersberger, Dirk and Monkman, Gareth J. and Dollinger, Markus and Dembianny, Sven and K{\"o}lbl, Andreas and Welker, Franz and Meier, Matthias and Thumann, Philipp and Swidergal, Krzysztof and Wagner, Marcus and Haug, Sonja and Vernim, Matthias and Seidenst{\"u}cker, Barbara and Weber, Karsten and Arsan, Christian and Schone, Reinhold and M{\"u}nder, Johannes and Schroll-Decker, Irmgard and Dillinger, Andrea Elisabeth and Fuchshofer, Rudolf and Monkman, Gareth J. and Shamonin (Chamonine), Mikhail and Geith, Markus A. and Koch, Fabian and {\"U}hlin, Christian and Schratzenstaller, Thomas and Saßmannshausen, Sean Patrick and Auchter, Eberhard and Kriz, Willy and Springer, Othmar and Thumann, Maria and Kusterle, Wolfgang and Obermeier, Andreas and Udalzow, Anton and Schmailzl, Anton and Hierl, Stefan and Langer, Christoph and Schreiner, Rupert}, title = {Forschungsbericht 2015}, editor = {Baier, Wolfgang}, address = {Regensburg}, organization = {Ostbayerische Technische Hochschule Regensburg}, isbn = {978-3-00-048589-3}, doi = {10.35096/othr/pub-1386}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-13867}, language = {de} } @misc{BeimlerLeisslEbneretal., author = {Beimler, Josef and Leißl, Caroline and Ebner, Lena and Elsner, Michael and M{\"u}hlbauer, Gerhard and Kohlert, Dieter and Schubert, Martin J. W. and Weiß, Andreas P. and Sterner, Michael and Raith, Thomas and Afranseder, Martin and Krapf, Tobias and Mottok, J{\"u}rgen and Siemers, Christian and Großmann, Benjamin and H{\"o}cherl, Johannes and Schlegl, Thomas and Schneider, Ralph and Milaev, Johannes and Rampelt, Christina and Roduner, Christian and Glowa, Christoph and Bachl, Christoph and Schliekmann, Claus and Gnan, Alfons and Grill, Martin and Ruhland, Karl and Piehler, Thomas and Friers, Daniel and Wels, Harald and Pflug, Kenny and Kucera, Markus and Waas, Thomas and Schlachetzki, Felix and Boy, Sandra and Pemmerl, Josef and Leis, Alexander and Welsch, Andreas F.X. and Graf, Franz and Zenger, Gerhard and Volbert, Klaus and Waas, Thomas and Scherzinger, Stefanie and Klettke, Meike and St{\"o}rl, Uta and Heyl, C. and Boldenko, A. and Monkman, Gareth J. and Kujat, Richard and Briem, Ulrich and Hierl, Stefan and Talbot, Sebastian and Schmailzl, Anton and Ławrowski, Robert Damian and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert and Valentino, Piergiorgio and Romano, Marco and Ehrlich, Ingo and Furgiuele, Franco and Gebbeken, Norbert and Eisenried, Michael and Jungbauer, Bastian and Hutterer, Albert and Bauhuber, Michael and Mikrievskij, Andreas and Argauer, Monika and Hummel, Helmut and Lechner, Alfred and Liebetruth, Thomas and Schumm, Michael and Joseph, Saskia and Reschke, Michael and Soska, Alexander and Schroll-Decker, Irmgard and Putzer, Michael and Rasmussen, John and Dendorfer, Sebastian and Weber, Tim and Al-Munajjed, Amir Andreas and Verkerke, Gijsbertus Jacob and Renkawitz, Tobias and Haug, Sonja and Rudolph, Clarissa and Zeitler, Annika and Schaubeck, Simon and Steffens, Oliver and Rechenauer, Christian and Schulz-Brize, Thekla and Fleischmann, Florian and Kusterle, Wolfgang and Beer, Anne and Wagner, Bernd and Neidhart, Thomas}, title = {Forschungsbericht 2013}, editor = {Baier, Wolfgang}, address = {Regensburg}, organization = {Ostbayerische Technische Hochschule Regensburg}, doi = {10.35096/othr/pub-799}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-7990}, pages = {80}, language = {de} } @misc{MauererRexhepajMonkmanetal., author = {Mauerer, Wolfgang and Rexhepaj, Tanja and Monkman, Gareth J. and Sindersberger, Dirk and Diermeier, Andreas and Neidhart, Thomas and Wolfrum, Dominik and Sterner, Michael and Heberl, Michael and Nusko, Robert and Maier, Georg and Nagl, Klaus and Reuter, Monika and Hofrichter, Andreas and Lex, Thomas and Lesch, Florian and Kieninger, B{\"a}rbel and Szalo, Alexander Eduard and Zehner, Alexander and Palm, Christoph and Joblin, Mitchell and Apel, Sven and Ramsauer, Ralf and Lohmann, Daniel and Westner, Markus and Strasser, Artur and Munndi, Maximilian and Ebner, Lena and Elsner, Michael and Weiß, Nils and Segerer, Matthias and Hackenberg, Rudolf and Steger, Sebastian and Schmailzl, Anton and Dostalek, Michael and Armbruster, Dominik and Koch, Fabian and Hierl, Stefan and Thumann, Philipp and Swidergal, Krzysztof and Wagner, Marcus and Briem, Ulrich and Diermeier, Andreas and Spreitzer, Stefan and Beiderbeck, Sabrina and Hook, Christian and Zobel, Martin and Weber, Tim and Groß, Simon and Penzkofer, Rainer and Dendorfer, Sebastian and Schillitz, Ingo and Bauer, Thomas and Rudolph, Clarissa and Schmidt, Katja and Liebetruth, Thomas and Hamer, Markus and Haug, Sonja and Vernim, Matthias and Weber, Karsten and Saßmannshausen, Sean Patrick and Books, Sebastian and Neuleitner, Nikolaus and Rechenauer, Christian and Steffens, Oliver and Kusterle, Wolfgang and G{\"o}mmel, Roland and Wellnitz, Felix and Stierstorfer, Johannes and Stadler, Dominik and Hofmann, Matthias J. and Motschmann, Hubert and Shamonin (Chamonine), Mikhail and Bleicher, Veronika and Fischer, Sebastian and Hackenberg, Rudolf and Horn, Anton and Kawasch, Raphael and Petzenhauser, Michael and Probst, Tobias and Udalzow, Anton and Dams, Florian and Schreiner, Rupert and Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian}, title = {Forschungsbericht 2016}, editor = {Baier, Wolfgang}, address = {Regensburg}, organization = {Ostbayerische Technische Hochschule Regensburg}, doi = {10.35096/othr/pub-1384}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-13840}, language = {de} } @misc{LautenschlaegerLeisDendorferetal., author = {Lautenschl{\"a}ger, Toni and Leis, Alexander and Dendorfer, Sebastian and Palm, Christoph and Schreiner, Rupert and Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and Dams, Florian and Bornmann, Benjamin and Navitski, Aliaksandr and Serbun, Pavel and M{\"u}ller, G{\"u}nter and Liebetruth, Thomas and Kohlert, Dieter and Pernsteiner, Jochen and Schreier, Franz and Heerklotz, Sabrina and Heerklotz, Allwin and Boos, Alexander and Herwald, Dominik and Monkman, Gareth J. and Treiber, Daniel and Mayer, Matthias and H{\"o}rner, Eva and Bentz, Alexander and Shamonin (Chamonine), Mikhail and Johansen, S{\o}ren Peter and Reichel, Marco and Stoll, Andrea and Briem, Ulrich and Dullien, Silvia and Renkawitz, Tobias and Weber, Tim and Dendorfer, Sebastian and Grifka, Joachim and Penzkofer, Rainer and Barnsteiner, K. and Jovanovik, M. and Wernecke, P. and V{\"o}gele, A. and Bachmann, T. and Pl{\"o}tz, Martin and Schliekmann, Claus and Wels, Harald and Helmberger, Paul and Kaspar, Marcel and H{\"o}nicka, M. and Schrammel, Siegfried and Enser, Markus and Schmidmeier, Monika and Schroll-Decker, Irmgard and Haug, Sonja and Gelfert, Verena and Vernim, Matthias}, title = {Forschungsbericht 2012}, editor = {Baier, Wolfgang}, address = {Regensburg}, organization = {Ostbayerische Technische Hochschule Regensburg}, doi = {10.35096/othr/pub-783}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-7834}, pages = {64}, language = {de} } @misc{AppelhansKampmannMottoketal., author = {Appelhans, Marie-Luise and Kampmann, Matthias and Mottok, J{\"u}rgen and Riederer, Michael and Nagl, Klaus and Steffens, Oliver and D{\"u}nnweber, Jan and Wildgruber, Markus and Roth, Julius and Stadler, Timo and Palm, Christoph and Weiß, Martin Georg and Rochholz, Sandra and Bierl, Rudolf and Gschossmann, Andreas and Haug, Sonja and Schmidbauer, Simon and Koch, Anna and Westner, Markus and Bary, Benedikt von and Ellermeier, Andreas and V{\"o}gele, Daniel and Maiwald, Frederik and Hierl, Stefan and Schlamp, Matthias and Ehrlich, Ingo and Siegl, Marco and H{\"u}ntelmann, Sven and Wildfeuer, Matthias and Br{\"u}ckl, Oliver and Sterner, Michael and Hofrichter, Andreas and Eckert, Fabian and Bauer, Franz and Dawoud, Belal and Rabl, Hans-Peter and Gamisch, Bernd and Schmidt, Ottfried and Heberl, Michael and Thema, Martin and Mayer, Ulrike and Eller, Johannes and Sippenauer, Thomas and Adelt, Christian and Haslbeck, Matthias and Vogl, Bettina and Mauerer, Wolfgang and Ramsauer, Ralf and Lohmann, Daniel and Sax, Irmengard and Gabor, Thomas and Feld, Sebastian and Linnhoff-Popien, Claudia and Ławrowski, Robert Damian and Langer, Christoph and Schreiner, Rupert and Sellmair, Josef}, title = {Forschung 2019}, editor = {Baier, Wolfgang}, address = {Regensburg}, organization = {Ostbayerische Technische Hochschule Regensburg}, isbn = {978-3-9818209-7-3}, doi = {10.35096/othr/pub-789}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-7890}, pages = {72}, abstract = {Bericht mit Forschungsprojekten aus verschiedenen Bereichen der OTH Regensburg mit dem Schwerpunktthema "K{\"u}nstliche Intelligenz" und einem Gespr{\"a}ch zur "Medizin der Zukunft"}, subject = {Forschung}, language = {de} } @misc{WeberDendorferSuessetal., author = {Weber, Karsten and Dendorfer, Sebastian and S{\"u}ß, Franz and Kubowitsch, Simone and Schratzenstaller, Thomas and Haug, Sonja and Mohr, Christa and Kiesl, Hans and Drechsler, J{\"o}rg and Westner, Markus and Kobus, J{\"o}rn and Schubert, Martin J. W. and Zenger, Stefan and Pietsch, Alexander and Weiß, Josef and Hinterseer, Sebastian and Schieck, Roland and Scherzinger, Stefanie and Klettke, Meike and Ringlstetter, Andreas and St{\"o}rl, Uta and Bissyand{\´e}, Tegawend{\´e} F. and Seeburger, Achim and Schindler, Timo and Ramsauer, Ralf and Kiszka, Jan and K{\"o}lbl, Andreas and Lohmann, Daniel and Mauerer, Wolfgang and Maier, Johannes and Scorna, Ulrike and Palm, Christoph and Soska, Alexander and Mottok, J{\"u}rgen and Ellermeier, Andreas and V{\"o}gele, Daniel and Hierl, Stefan and Briem, Ulrich and Buschmann, Knut and Ehrlich, Ingo and Pongratz, Christian and Pielmeier, Benjamin and Tyroller, Quirin and Monkman, Gareth J. and Gut, Franz and Roth, Carina and Hausler, Peter and Bierl, Rudolf and Prommesberger, Christian and Ławrowski, Robert Damian and Langer, Christoph and Schreiner, Rupert and Huang, Yifeng and She, Juncong and Ottl, Andreas and Rieger, Walter and Kraml, Agnes and Poxleitner, Thomas and Hofer, Simon and Heisterkamp, Benjamin and Lerch, Maximilian and Sammer, Nike and Golde, Olivia and Wellnitz, Felix and Schmid, Sandra and Muntschick, Claudia and Kusterle, Wolfgang and Paric, Ivan and Br{\"u}ckl, Oliver and Haslbeck, Matthias and Schmidt, Ottfried and Schwanzer, Peter and Rabl, Hans-Peter and Sterner, Michael and Bauer, Franz and Steinmann, Sven and Eckert, Fabian and Hofrichter, Andreas}, title = {Forschungsbericht 2017}, editor = {Baier, Wolfgang}, address = {Regensburg}, organization = {Ostbayerische Technische Hochschule Regensburg}, isbn = {978-3-9818209-3-5}, doi = {10.35096/othr/pub-1383}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-13835}, subject = {Forschung}, language = {de} } @article{SerbunBornmannNavitskietal., author = {Serbun, Pavel and Bornmann, Benjamin and Navitski, Aliaksandr and M{\"u}ller, G{\"u}nter and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Stable field emission of single B-doped Si tips and linear current scaling of uniform tip arrays for integrated vacuum microelectronic devices}, series = {Journal of Vacuum Science \& Technology B Nanotechnology and Microelectronics}, volume = {31}, journal = {Journal of Vacuum Science \& Technology B Nanotechnology and Microelectronics}, number = {2}, publisher = {AIP Publishing}, doi = {10.1116/1.4765088}, abstract = {Advanced Si-based semiconductor technology is most suitable to fabricate uniform nanostructures as integrated field emitter arrays for novel vacuum electronic devices. In order to improve the field emission homogeneity and stability of p-type silicon tip arrays for pulsed sensor applications, the authors have systematically studied the influence of the fabrication parameters on the tip shape and on the specific operating conditions. Based on detailed design calculations of the field enhancement, they have fabricated two series of hexagonal arrays of B-doped Si-tips in a triangular arrangement. The first (second) type contains three (four) patches with different number of tips (1, 91, 547 and 1, 19, 1027, 4447 for the first and second type, respectively) of about 1 (2.5) μm height, ∼20 (20) nm apex radius, and 20 (10) μm pitch. The field emission properties of both individual tips and complete arrays were investigated with a field emission scanning microscope at a pressure of 10-9 mbar. The current plateau of these tips typically occurs at about 10 (3) nA and around 65 (25) V/μm field level. In this carrier saturation range, single tips provide the highest current stability (<5\%) and optical current switching ratio (∼2.5). Fairly homogeneous emission of the tip arrays leads to an undershooting of the expected linear scaling of the mean plateau current as well as to a much improved current stability (<1\%).}, language = {en} } @article{BiekerRoustaieSchlaaketal., author = {Bieker, Johannes and Roustaie, Farough and Schlaak, Helmut F. and Langer, Christoph and Schreiner, Rupert and Lotz, Marcel and Wilfert, Stefan}, title = {Field emission characterization of in situ deposited gold nanocones with variable cone densities}, series = {Journal of Vacuum Science and Technology B}, volume = {36}, journal = {Journal of Vacuum Science and Technology B}, number = {2}, publisher = {AIP Publishing}, doi = {10.1116/1.5009504}, abstract = {For the fabrication of field emitter cathodes with metallic nanocones, an in situ fabrication technique based on electrodeposition in an ion track etched polymer template was used. Three samples with nanocones made of gold and different cone densities were deposited on a circular electrode with a diameter of 2.5 mm, using templates with pore density of 6 × 104, 4 × 105, and 1 × 106 cones/cm2. The cones had a height of 24 μm, a base diameter between 3 and 3.75 μm, and a tip diameter below 500 nm. Integral field emission measurements revealed onset fields of down to 3.1 V/μm and average field enhancement factors of up to 1240. For one sample, the maximum emission current from the cathode reached 142.2 μA at an applied voltage of 338 V between cathode and extraction grid, which had a distance of 50 μm. To investigate the stability of the field emission current, cumulative long-term measurements were performed for over 50 h. A stable emission current of (31.0 ± 1.3) μA at an average applied voltage of 290 V (E = 5.8 V/μm) was observed. For currents above 100 μA, a decrease of the current and therefore a degradation of the emitter structures occurred.}, language = {en} } @misc{DuesbergBachmannEdleretal., author = {D{\"u}sberg, Felix and Bachmann, Michael and Edler, Simon and Pahlke, Andreas and Langer, Christoph and Prommesberger, Christian and Schreiner, Rupert and Bunert, Erik and Wendt, Cornelius and Zimmermann, Stefan}, title = {Novel Non-Radiative Electron Source}, series = {43rd International Symposium of Capillary Chromatography \& 16h GC x GC Symposium 2019}, journal = {43rd International Symposium of Capillary Chromatography \& 16h GC x GC Symposium 2019}, abstract = {Recently a non-radioactive electron capture detector based on a thermionic electron emitter has been demonstrated [1]. Using field emitter arrays (FEAs) would yield non-radioactive portable low power devices with fast switching capability. By combining FEAs with a vacuum-sealed housing and an electron transparent membrane window, such electron sources can be operated in an ambient pressure environment.}, language = {en} } @inproceedings{PrommesbergerLangerSchreiner, author = {Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert}, title = {Stable and low noise field emission from single p-type Si-tips}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520018}, pages = {1-2}, abstract = {Single gated p-type Si-tips with two different tip radii were fabricated. An emission current of 2.40 μA was measured for the sharp-edged tip at a voltage of 170 V. In contrast, a stable and reproducible emission behavior was observed with an increased tip radius resulting in a pronounced saturation region between 90 V and 150 V, but merely an emission current of 0.55 μA at 150 V. More remarkable is the stable emission behavior with fluctuation of ± 4 \% during a measurement period of 30 minutes. The integral emission current in a homogeneous tip array (16 emitters) showed nearly the same I-V characteristics compared to the single tip and is therefore, most dominated by only a stable single tip in the array.}, language = {en} } @inproceedings{LindnerBerndtPrommesbergeretal., author = {Lindner, Matthias and Berndt, Dominik and Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert}, title = {Field emission assisted micro plasma discharges at vacuum and atmospheric pressures}, series = {31st International Vacuum Nanoelectronics Conference (IVNC), 2018, Kyoto, Japan}, booktitle = {31st International Vacuum Nanoelectronics Conference (IVNC), 2018, Kyoto, Japan}, doi = {10.1109/IVNC.2018.8520181}, pages = {2}, abstract = {Spatially confined non-equilibrium plasmas at vacuum and atmospheric pressure in the dimensions from a few microns to one millimeter are a promising approach to the generation and maintenance of stable glow discharges. The realization of these micro-discharges or micro-plasmas enable more accurate investigations in the field of micro plasma research. We report on field emission assisted micro plasmas excited by an alternating current with frequencies up to 1 kHz. Due to the field enhancement caused by an array of Si nano-tip structures the ignition voltage of stable plasma discharges can be reduced by 30\%.}, language = {en} } @inproceedings{BerndtLindnerTschurtschenthaleretal., author = {Berndt, Dominik and Lindner, Matthias and Tschurtschenthaler, Karl and Langer, Christoph and Schreiner, Rupert}, title = {Miniaturized Plasma Actuator Flow Measurements by MEMS-Based Thermal Conductivity Sensors}, series = {MDPI Proceedings of Eurosensors 2018, 9-12 September, Graz}, volume = {Vol.13}, booktitle = {MDPI Proceedings of Eurosensors 2018, 9-12 September, Graz}, number = {2}, doi = {10.3390/proceedings2130939}, abstract = {The gasflow created by a minaturized dielectric barrier discharge (DBD) plasma actuator is measured by a MEMS-based thermal conductivity gas sensor giving an indication of flow velocity and flow direction. The possiblity of several sensors in a small area gives a far better accuracy of local flow phenomena compared to conventional sensors. This is important for a better understanding of plasma- induced flow characteristics.}, language = {en} } @article{BerndtMuggliWittweretal., author = {Berndt, Dominik and Muggli, Josef and Wittwer, Franz and Langer, Christoph and Heinrich, Stephan and Knittel, Thorsten and Schreiner, Rupert}, title = {MEMS-based thermal conductivity sensor for hydrogen gas detection in automotive applications}, series = {Sensors and Actuators A: Physical}, volume = {305}, journal = {Sensors and Actuators A: Physical}, number = {April}, publisher = {Elsevier}, doi = {10.1016/j.sna.2019.111670}, abstract = {Accurate detection of hydrogen gas in vehicle interiors is very important for the future of a fuel cell car. Since this type of gas is highly volatile and flammable, the measurement methods have to be very reliable and precise due to safety reasons. In this paper a thermal conductivity sensor for hydrogen gas detection is presented, exhibiting a lower detection limit of 2000 ppm hydrogen in laboratory air. The sensor element is realized by micro-fabrication techniques on silicon wafers. The heated filament is exposed by a selective wet etching process creating a micro-hotplate on a thin membrane. In order to minimize power consumption, the sensor is operated in pulsed mode. Hydrogen gas detection was carried out using a synthetic gas testbench. Measurements of hydrogen contents ranging from 0\% to 4\% with an increment of 0.5\% were successfully performed for ambient gas temperatures between -15°C and 84°C. Including humidity, high moisture contents have the greatest influence on thermal conductivity. This was predicted in theoretical investigations and confirmed in experiments. For evaluation, both the change in resistance ΔR as well as the time constant τ were taken as sensor output. For both quantities, the previously established theoretical relationship with thermal conductivity could be confirmed.}, language = {en} } @article{SchreinerLangerPrommesbergeretal., author = {Schreiner, Rupert and Langer, Christoph and Prommesberger, Christian and Dams, Florian}, title = {Compact and Energy-Efficient Field Emission Cathodes for Sensor Applications}, series = {Advanced Materials Research}, volume = {1024}, journal = {Advanced Materials Research}, publisher = {Scientific.net}, doi = {10.4028/www.scientific.net/amr.1024.372}, pages = {372 -- 375}, abstract = {We report on miniaturized silicon field emitter arrays for the application in compact and energy-saving vacuum-microelectronic devices, e.g. sensors or x-ray tubes. Since standard silicon semiconductor technology has been used for the fabrication, they may be easily integrated with other silicon based circuits and devices on the same chip. The silicon tip geometry and the operating conditions were optimized in order to obtain highly uniform and stable electron field emission from large area cathode arrays. A series of uniform hexagonal tip arrays containing each 547 tips were fabricated and characterized. The electron emission properties of both individual tips as well as of complete emitter arrays were investigated. A saturation level in the voltage-current characteristics was found, which can be explained by the limitation of the supply of electrons due to the p-type silicon wafer material. When operating the arrays in the current saturation regime at an emission current of ~ 1 nA per tip, a highly stable and low noise emission can be observed.}, language = {en} } @inproceedings{BiekerRoustaieLangeretal., author = {Bieker, Johannes and Roustaie, Farough and Langer, Christoph and Schreiner, Rupert and Schlaak, Helmut F.}, title = {Innovatives Verfahren zur Herstellung und Integration metallischer Nanokonen f{\"u}r die Feldemission}, series = {MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in M{\"u}nchen}, booktitle = {MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in M{\"u}nchen}, number = {CD-ROM}, publisher = {VDE-Verlag}, address = {M{\"u}nchen}, isbn = {978-3-8007-4491-6}, pages = {797 -- 800}, abstract = {In den letzten Jahren wurde am Institut f{\"u}r Elektromechanische Konstruktionen die Fabrikation und Integration von metallischen Nanodr{\"a}hten und Nanokonen mittels Template-basierter Abscheidung erforscht. Diese Variante der in-situ Abscheidung von metallischen Nanostrukturen bietet eine Vielzahl von Anwendungsm{\"o}glichkeiten. Im Rahmen dieses Beitrags werden das Herstellungsverfahren zur Herstellung metallischer Nanokonen vorgestellt. Dies beinhaltet sowohl die Templatepr{\"a}paration mittels asymmetrischen {\"A}tzens als auch die anschließende Integration mittels galvanischer Abscheidung. Eine Anwendung der metallischen Nanokonen stellt die Verwendung als Feldemitter in der Vakuumelektronik dar. Es werden erste Messungen der Langzeitstabilit{\"a}t des Feldemissionsstromes der metallischen Konen pr{\"a}sentiert.}, language = {de} } @inproceedings{KleshchSerbunOrekhovetal., author = {Kleshch, Victor I. and Serbun, Pavel and Orekhov, Anton and L{\"u}tzenkirchen-Hecht, Dirk and Obraztsov, Alexander N. and Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert and Lutzenkirchen-Hecht, Dirk}, title = {Field emission properties of p-type silicon tips decorated with tungsten nanoparticles}, series = {2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany}, booktitle = {2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany}, publisher = {IEEE}, doi = {10.1109/IVNC.2017.8051580}, pages = {138 -- 139}, abstract = {An array of conical-shaped p-type silicon tips was fabricated by using reactive ion etching and sharpening oxidation. The apex of each tip was decorated by a tungsten hemispherical nanoparticle. Field emission properties of the tips were measured by a tungsten-needle anode positioned above the tip apex. Tips decorated with tungsten nanoparticles demonstrated a smaller saturation region in current-voltage characteristics compared to the pristine tips. An emission activation process, which consisted in sudden current increase at certain value of applied voltage, was observed for the decorated silicon tips. This behavior was explained by the formation of vertical protrusions extending from the metal particles revealed by scanning electron microscopy after field emission experiments.}, language = {en} } @inproceedings{KnappLangerPrommesbergeretal., author = {Knapp, Wolfram and Langer, Christoph and Prommesberger, Christian and Lindner, Matthias and Schreiner, Rupert}, title = {Investigations of the transition from field electron emission to stable plasma discharge in a micro electron source at vacuum pressure}, series = {2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany}, booktitle = {2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany}, publisher = {IEEE}, doi = {10.1109/IVNC.2017.8051594}, pages = {166 -- 167}, abstract = {We report on the transition from field electron emission to plasma discharges. During an experiment with a miniaturized field emission electron source a plasma discharge accompanied by a luminous effect was observed. A novel graphical evaluation method was used to interpret and to compare the observed phenomenon.}, language = {en} } @article{DamsNavitskiPrommesbergeretal., author = {Dams, Florian and Navitski, Aliaksandr and Prommesberger, Christian and Serbun, Pavel and Langer, Christoph and M{\"u}ller, G{\"u}nter and Schreiner, Rupert}, title = {Homogeneous Field Emission Cathodes With Precisely Adjustable Geometry Fabricated by Silicon Technology}, series = {IEEE Transactions on Electron Devices}, volume = {59}, journal = {IEEE Transactions on Electron Devices}, number = {10}, publisher = {IEEE}, issn = {0018-9383}, doi = {10.1109/TED.2012.2206598}, pages = {2832 -- 2837}, abstract = {Silicon-based cathodes with precisely aligned field emitter arrays of sharp tips applicable for miniaturized electron sources were successfully fabricated and characterized. This was made possible by an improved fabrication process using wet thermal oxidation, wet etching, and reactive-ion etching steps with adjustable anisotropy. As substrate materials, both p-doped silicon and n-doped silicon were used. The cathode chips contain about 3 × 10 5 Si tips/cm 2 in a triangular array with tip heights of 2.5 μm, tip radii of less than 30 nm, and spacing of 20 μm. Well-aligned field emission (FE) and excellent homogeneity from all tips (i.e., 100\% efficiency) and maximum stable currents of typically 0.1 μA (0.6 μA) for p (n)-type Si were reproducibly achieved. The current-voltage characteristics of the p-Si tips exhibit the expected saturation at around 10 nA with around ten times better current stability, whereas the n-Si tips show the usual Fowler-Nordheim behavior. Additional coating of the Si tips with 5-nm Cr and 10-nm Au layers resulted in improved stability and at least five times higher average FE current limits (about 3 μA) at about 30\% higher operation voltage.}, language = {en} } @article{LangerBerndtSchreiner, author = {Langer, Christoph and Berndt, Dominik and Schreiner, Rupert}, title = {Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation}, series = {Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}, volume = {40}, journal = {Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}, number = {5}, publisher = {AIP Publishing}, doi = {10.1116/6.0001964}, abstract = {To optimize the measurement range of thermal conductivity vacuum gauges, an expression for the sensitivity is required that takes into account all geometrical, material-specific, and operating parameters. Therefore, equations of the sensor output signal as a function of the pressure for the constant current and the constant temperature mode have been developed analytically. Based on these equations, the sensitivity of the vacuum gauge and its influencing parameters was investigated and discussed. For comparable conditions, the constant temperature operation shows a significantly higher sensitivity for high pressures, while the constant current operation shows higher sensitivity at low pressures. The sensitivity in both the constant current and the constant temperature mode depends on the ratio of the filament surface area and the parasitic thermal conductance. In addition, for the constant current operation, the sensitivity also depends on the current value and the temperature coefficient of the filament resistor. For the constant temperature operation, the sensitivity additionally depends on the distance of the filament and the reference plane. However, to extend the measurement range of a thermal conductivity vacuum gauge toward low pressures, a reduction of the parasitic thermal conductance is mandatory for both the constant current and the constant temperature mode.}, language = {en} } @inproceedings{LangerPrommesbergerDamsetal., author = {Langer, Christoph and Prommesberger, Christian and Dams, Florian and Schreiner, Rupert}, title = {Theoretical investigations into the field enhancement factor of silicon structures}, series = {25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South), 09.- 13.07.2012}, booktitle = {25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South), 09.- 13.07.2012}, publisher = {IEEE}, address = {Piscataway, N.J.}, isbn = {978-1-4673-1984-3}, issn = {2380-6311}, doi = {10.1109/IVNC.2012.6316886}, abstract = {In order to optimize our field-emitting silicon structures, the influence of geometric parameters like aspect ratio, aperture angle and curvature on the field enhancement factor was investigated by finite element simulations. A universal geometric model consisting of a rounded triangle and elliptic curvatures was taken for modeling a variety of different silicon tip as well as ridge structures. Whereas, a high dependency of the field enhancement on the aperture angle was found, the simulations show that the elliptic curvature affects the field enhancement only marginal.}, language = {en} }