@article{CheeKammlerGrahametal., author = {Chee, See Wee and Kammler, Martin and Graham, Jeremy and Ross, Frances M. and Hull, Robert}, title = {Direct Imaging of Microstructural Changes in Si Induced by FIB-Patterning with Si ++ and Ga + Ions}, series = {Microscopy and Microanalysis}, volume = {17}, journal = {Microscopy and Microanalysis}, number = {S2}, publisher = {Cambridge University Press}, doi = {10.1017/S1431927611004156}, pages = {656 -- 657}, language = {en} }