TY  - CONF
A1  - Prommesberger, Christian
A1  - Langer, Christoph
A1  - Ławrowski, Robert Damian
A1  - Schreiner, Rupert
T1  - Benzocyclobutene as a novel integrated spacer material in a field emission electron source
T2  - International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg
N2  - For the realization of a miniaturized field emission electron source we tested benzocyclobutene (BCB) as a new spacer material between cathode and anode. We fabricated black silicon emitters and characterized the emission behavior with an integrated 5 μm thin and large-area spacer of BCB. The integrated BCB layer allows the realization of a compact electron source with only two components consisting of a cathode with BCB and a grid. The comparison with other spacer materials like polyimide (25 μm thickness) or mica (50 μm thickness) revealed for the cathode with BCB a significantly reduced operational voltage of 240 V for a field emission current of 1 μA.
KW  - field emission
KW  - benzocyclobutene
KW  - integrated spacer
KW  - electron source
KW  - black silicon
Y1  - 2021
UR  - https://opus4.kobv.de/opus4-oth-regensburg/frontdoor/index/index/docId/1133
SP  - 192
EP  - 193
PB  - IEEE
ER  -