@inproceedings{ŁawrowskiLangerSchreineretal.2021,
  author    = {Robert Damian Ławrowski and Christoph Langer and Rupert Schreiner and Josef Sellmair},
  title     = {Nano Emitters on Silicon Pillar Structures generated by a Focused Electron Beam Induced Deposition},
  booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan},
  doi       = {10.1109/IVNC.2018.8520059},
  year      = {2021},
}