TY - CONF A1 - Schels, Andreas A1 - Edler, Simon A1 - Hansch, Walter A1 - Bachmann, Michael A1 - Herdl, F. A1 - Dusberg, F. A1 - Eder, Magdalena A1 - Meyer, M. A1 - Dudek, M. A1 - Pahlke, A. A1 - Schreiner, Rupert A2 - Purcell, Stephen A2 - Mazellier, Jean-Paul T1 - Current dependent performance test used on different types of silicon field emitter arrays T2 - 2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France N2 - A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduced by slightly varying the original fabrication process [1]. The comparison shows superiority of tip like emitters over blade like structures. Y1 - 2021 UR - https://opus4.kobv.de/opus4-oth-regensburg/frontdoor/index/index/docId/3402 SN - 978-1-6654-2589-6 SP - 1 EP - 2 PB - IEEE CY - Piscataway, NJ ER -