@inproceedings{HausladenBuchnerSchelsetal.2023, author = {Matthias Hausladen and Philipp Buchner and Andreas Schels and Simon Edler and Michael Bachmann and Rupert Schreiner}, title = {An Integrated Field Emission Electron Source on a Chip Fabricated by Laser-Micromachining and Mems Technology}, booktitle = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, pages = {115 -- 116}, doi = {10.1109/IVNC57695.2023.10189001}, year = {2023}, }