@article{HausladenBuchnerBartletal.2024, author = {Matthias Hausladen and Philipp Buchner and M. Bartl and Michael Bachmann and Rupert Schreiner}, title = {Integrated multichip field emission electron source fabricated by laser-micromachining and MEMS technology}, journal = {Journal of Vacuum Science \& Technology B}, volume = {42}, number = {1}, doi = {10.1116/6.0003233}, year = {2024}, }