@inproceedings{SchreinerDamsPrommesbergeretal.2012, author = {Rupert Schreiner and Florian Dams and Christian Prommesberger and Benjamin Bornmann and Pavel Serbun and Aliaksandr Navitski and G{\"u}ntner M{\"u}ller}, title = {Silicon-based integrated field emission electron sources for sensor application}, booktitle = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Wuppertal, Germany}, pages = {19 -- 20}, url = {https://ieeexplore.ieee.org/document/6004541?arnumber=6004541}, year = {2012}, }