@article{ƁawrowskiPrommesbergerLangeretal.2014, author = {Robert Damian Ɓawrowski and Christian Prommesberger and Christoph Langer and Florian Dams and Rupert Schreiner}, title = {Improvement of Homogenity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching}, journal = {Advances in materials science and engineering}, volume = {2014}, doi = {10.1155/2014/948708}, year = {2014}, }