@inproceedings{HauslerGensleinRothetal.2021, author = {Peter Hausler and Christa Genslein and Carina Roth and Thomas Hirsch and Rudolf Bierl}, title = {Mikro-Opto-Elektro-Mechanisches Sensorsystem zur Oberfl{\"a}chenplasmonenresonanzspektroskopie}, booktitle = {MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in M{\"u}nchen}, number = {CD-ROM}, pages = {645 -- 647}, year = {2021}, }