@article{BreuerBachmannDuesbergetal.2021, author = {Janis Breuer and Michael Bachmann and Felix D{\"u}sberg and Andreas Pahlke and Simon Edler and Christoph Langer and Christian Prommesberger and Robert Damian Ɓawrowski and Rupert Schreiner and Pavel Serbun and Dirk L{\"u}tzenkirchen-Hecht}, title = {Extraction of the current distribution out of saturated integral measurement data of p-type silicon field emitter arrays}, journal = {Journal of Vacuum Science and Technology B}, volume = {36}, number = {5}, doi = {10.1116/1.5035189}, year = {2021}, }