TY - JOUR A1 - Hornberger, Helga A1 - Weissmann, R. A1 - Lutz, N. T1 - Machining of silica glasses using excimer laser radiation T2 - Glastechnische Berichte - Glass Science and Technology Y1 - 1996 UR - https://opus4.kobv.de/opus4-oth-regensburg/frontdoor/index/index/docId/539 VL - 69 IS - 2 SP - 44 EP - 49 ER -