Huesgen, Till
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Wide bandgap semiconductors, SiC and GaN-based power devices represent key candidates in the development of more efficient devices due to their superior electrical and thermal properties compared to silicon. To achieve maximal performance from WBG semiconductors, new packaging technologies and thermo-electric designs must be developed to ensure efficient and fast switching of devices while minimizing losses. The paper aims to investigate the thermal and mechanical behavior of new prepackage embedding technologies by finite element simulation. The focus is on insulated substrates including direct bonded copper (DBC) with various dielectrics such as AlN, Al 2O 3, Si3N 4 and new insulated metal substrates (IMS) with emphasis on commercially available materials and thicknesses. This study proposes a thermo-mechanical pareto-optimization methodology able to identify the best substrate configuration. The sintered silver layer (in both sides of the chip), which is the most prone to failure due to delamination, has been modelled with a temperature-dependent bilinear hardening model to account for plasticity. Pareto-optimization accounts for the module thermal resistance and the plastic strain or Von Mises Stress in the sintered layer. Results demonstrate that the best candidate from the thermo-mechanical point of view is the DBC with AlN showing a thermal resistance of 0.34 K/W, accumulative plastic strain of 0.18 % and Von Mises stress of 274 MPa. Finally, the parasitic inductance of multiple pre-packages is evaluated to scale the power of the module. Proper design allows to achieve a stray inductance as small as 1.23 nH for two prepackages and 2.85 nH for four prepackages.
Horizontal chip cracks have been reported in various scientific publications on PCB embedded power semiconductor devices. This study investigates in detail the root cause of the cracks. Experimental evidence indicates that the chip fractures in the mechanical grinding process during preparation of the cross-sections. Here, two different factors are relevant: First, the mechanical fracture strength of the semiconductor die decreases when grinding its edge. The use of P320 sand paper reduces the characteristic fracture strength from 719 MPa to 211 MPa. Second, the tensile stresses in the chip edge increase considerably when, part of the die and package is removed by grinding. Both effects together result in a failure probability of 100%. The use of finer grain sandpaper for target preparation helps to reduce the probability of generating horizontal chip cracks during cross-sectioning.
This study investigated the thermal performance of a packaging solution designed to manage the electrical isolation and cooling of high voltage ( ) SiC power semiconductor > 3300 V devices. The proposed packaging merges the ceramic substrate and the heat exchanger into a single component, streamlining the overall design. Specifically, a novel heat exchanger is developed for a multi-chip module (20 kV), utilizing a combination of jet impingement and channel- flow cooling techniques. Computational fluid dynamics (CFD) simulations and experimental validation are conducted on a multi-chip module to assess the thermal resistance of this new cooling solution. The results demonstrate a
low thermal resistivity of 0.118 cm2K/W, indicating the potential for improved cooling performance in high voltage and power density semiconductor applications.
Tests are carried out on two different series-connected switches made of six SiC MOSFETs capable of blocking 10 kV and 20 kV respectively. High voltage capacitors are connected to the drain terminals of the MOSFETs to emulate the common mode currents’ paths due to parasitic capacitances of the packaging. Due to high dV/dt, common mode currents become dangerous to the switch as they unsettle the voltage sharing during turn-off and unbalance switching losses. This could lead some of the MOSFETs to experience avalanche breakdown. A novel packaging approach that suppresses or balances the common mode currents is introduced.
Gallium nitride transistors have a smaller die area compared to silicon-based devices, which can lead to thermal challenges in high current density applications. Therefore, thermally optimized packages with a high heat spreading capability in combination with small parasitic are necessary. This work investigates the thermal performance a 7 mΩ, 100 V GaN HEMT in a thermally optimized single chip package with integrated RTD and compares it to the commercial counterpart. The thermal optimized package shows a significantly better transient thermal impedance resulting in a static thermal resistance of 3.1 K/W, which is a 20 % reduction in comparison to the COTS package. The integrated RTD trace has a relative reaction time of 590 ms, which is 30-fold slower in comparison to the junction temperature. To show the identical electrical behavior, although the single chip package is larger, it is compared with the commercial off-the-shelf package and a 5 mΩ, 100 V GaN single chip package in a 300 kHz, 48 V buck converter. Both 7 mΩ versions have identical efficiencies of ≈97.5 % up to 50 A output current, slightly outperforming the 5 mΩ GaN transistor. With its combination of improved thermal characteristics and lowinductance, the thermally optimized package of the GaN device offers more degrees of freedom in the design of power converter to exploit trade-offs between longer lifetime, higher temperature operation and power density. Index Terms—gallium nitride, high electron mobility transistor, (thermal) performance evaluation, thermally optimized package, DC/DC converter, high current application, parallelization
In this work an approach for a direct experimental comparison of the application-oriented performance between two high current GaN DC/DC converters based on 7mΩ, 100V GaN HEMTs in a commercial off-the-shelf top-cooled package and 5mΩ, 100V GaN HEMTs embedded in a thermally-optimized single-chip package is given. The two packaging versions are compared by a maximally identical implementation of the power and gate loops in a 48V, 300kHz buck converter with two parallel GaN HEMTs. In the single-chip package the die is directly mounted on a 12×6mm 2 copper-heat spreader offering a significantly lower thermal resistance to heatsink (1.69KW −1 ) in comparison to the commercial off-the-shelf version (2.45KW −1 ). For a direct benchmark, the COTS-based converter has an identical power-loop to the SCP-version with a novel gate-drive concept. Both versions have an efficiency of 96.8% at 65A output current (output power: 1.5kW), while the commercial off-the-shelf version has a better efficiency for lower currents, due to its better hard-switching Figure-of-Merits and therefore lower switching losses and reaches an output current of up to 80A (output power: 1.75kW). A detailed analytical loss breakdown for the different transistors in dependence of the temperature and output current is given to proof the measured current point, where the efficiencies of both converters are identical, since the higher switching losses of the SCP version are compensated by lower conduction losses at higher currents and temperatures compared to the smaller COTS transistor. Finally, an outlook on further improvements for reaching higher output currents and potential converters for a more fair comparison of different thermally optimized SMD packages are given.
Das Einbetten von Halbleiterbauelementen stellt einen innovativen Ansatz für die Aufbau- und Verbindungstechnik (AVT) leistungselektronischer Systeme dar. Im Rahmen von zahlreichen Forschungsvorhaben wurde gezeigt, dass im Vergleich zu einer konventionellen AVT geringere parasitäre Induktivitäten und Widerstände [1, 2]und damit geringere Leitungs- und Schaltverluste ermöglicht werden. Auch kann der thermische Widerstand durch den Einsatz von Dickkupfersubstraten und wärmeleitfähigen organischen Isolatoren erheblich reduziert werden [2, 3, 4]. Dadurch lässt sich auf Systemebene eine höher Leistungsdichte erreichen [5], ohne dass dadurch die Lastwechselfestigkeit leidet [6, 3].
Dennoch findet die Technologie bis heute nur im Low-Power Bereich oder zum Chip-Scale Packaging von einzelnen Leistungsschaltern kommerziellen Einsatz.
Dieser Vortrag diskutiert mögliche Hemmnisse und Grenzen der Technologie.
This work investigates a packaging solution for high power density semiconductors (> 200 W/cm 2), allowing for a dramatic reduction in size and complexity of power electronics modules. The multiple layers in standard packaging structures degrade the cooling efficiency due as they lengthen the path between dies and heatsinks. Here, we reduce the layer count by merging the ceramic substrate and the heat exchanger in a single part. CFD simulations and experimental validation are performed on a single-chip cooling packaging, and demonstrate a 10-20 % reduction in thermal resistance over more traditional cooling solutions.
The ever-increasing switching speed of semiconductor devices requires a precise measurement of steep current transients. The M-shunt concept offers high signal fidelity, good cooling, and simple manufacturing. Depending on the resistive material used, temperature as well as skin and proximity effects impede static and dynamic measurements to a different degree. A step forward has been derived from the ideal coaxial shunt, so far, a purely theoretical concept, which is hardly producible due to its sophisticated structure. By transferring this concept to the M-shunt structure with its improved PCB manufacturing technologies it can now be realised in practice. Nevertheless, the calibration and the correct degree of delay compensation remain challenging and are investigated more closely within this paper. Furthermore, it will be discussed why the conventional method of bandwidth determination doesn't work for the M-shunt structure. In addition to the low inductance introduced into the load circuit, the high bandwidth of the shunts could be demonstrated, as well as the possibility to extend this by design rules. Supplemented by the advantages of the lower load inductance, the M-shunt will become the tool of choice for characterising switching transients at least up to 200 MHz required bandwidth eventually. Although it is obviously difficult to improve the 3 dB bandwidth with suitable design rules, the range of nearly entirely unaffected measurement frequencies (e.g. < 1 dB) can be significantly extended by limited coupling. For even higher frequencies, measurements of the current M-shunt models, as well as for the coaxial shunts used as reference, should be corrected by post processing to get precise measurement results.
Previously, a novel concept for PCB embedding of power semiconductors with reinforced top contacts has been published by our group. In this work, a thermomechanical study is performed to understand the fracture probability of the chip during fabrication. The ball-on-ring (BOR) and ball-on-edge (BOE) tests are employed to characterize the chip strength. A probabilistic model is used to evaluate the failure probability. The contribution of different fabrication steps to the overall failure probability is investigated. A parametric analysis is performed to analyze the impact of material choice and the thickness of the substrate and the interposer. A single-step sintered package with a 200 μm thick Cu interposer and an 800 μm thick Cu substrate with hard Cu leads to a 12% failure probability compared to 52% for an identical stack with a soft Cu substrate. The top surface failure probability for a 150 μm thick CIC interposer is 0.016% compared to 8.6% for a 100 μm Cu interposer., for an identical 800μm thick Cu substrate. A sinterlamination process, where the die-attach and curing of the prepreg material simultaneously take place, results in a 0.03% failure probability.