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Increasing miniaturization requires improved and highly miniaturized optical 3D metrology systems. In this paper a basic measurement principle and a proposed optical design of a highly miniaturized endoscopic spatial confocal point distance sensor are presented. The sensor uses a, to our knowledge new technique called spatial confocal point distance measurement. A special feature of the proposed sensor design is the high degree of miniaturization, through femtosecond direct laser writing and the use of optical fiber bundles, which enable an
endoscopic application.
We present a highly miniaturized endoscopic point distance sensor based on a spatial confocal measurement principle. The sensor uses a new technique called spatial confocal point distance measurement. A special feature of the proposed sensor design is the high degree of miniaturization through femtosecond direct laser writing and the use of optical fiber bundles, which enable an endoscopic application. We show the complete sensor measurement principle, sensor head design, experimental setup, and experimental results.