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This work investigates a packaging solution for high voltage semiconductors (20 kV), allowing for a dramatic reduction in size and complexity of power electronics modules. The standard packaging structures typically introduce a competition between electrical insulation (which requires thick insulating layers) and thermal performance (where thin, high thermal conductivity layers are preferred). Here, we introduce a concept which addresses this competition and is based on direct cooling using dielectric liquid. Single-chip heatsinks are designed, optimized using computational fluid dynamics (CFD), built and tested.
This work investigates a packaging solution for high power density semiconductors (> 200 W/cm 2), allowing for a dramatic reduction in size and complexity of power electronics modules. The multiple layers in standard packaging structures degrade the cooling efficiency due as they lengthen the path between dies and heatsinks. Here, we reduce the layer count by merging the ceramic substrate and the heat exchanger in a single part. CFD simulations and experimental validation are performed on a single-chip cooling packaging, and demonstrate a 10-20 % reduction in thermal resistance over more traditional cooling solutions.