Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology
- The spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This work investigates the impact of the spectral composition and light power of the light source on the sensitivity and accuracy of this method. A thorough optimization of the light source will be conducted, demonstrating the impact of various spectral compositions and light source power on the system performance, taking into account the system-related etendue. In addition, the optimization of the spectral transmission filter used in the optical spectral analysis unit and its influence on the accuracy and sensitivity of the system overThe spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This work investigates the impact of the spectral composition and light power of the light source on the sensitivity and accuracy of this method. A thorough optimization of the light source will be conducted, demonstrating the impact of various spectral compositions and light source power on the system performance, taking into account the system-related etendue. In addition, the optimization of the spectral transmission filter used in the optical spectral analysis unit and its influence on the accuracy and sensitivity of the system over the entire measurement range is shown.…
| Author: | Jonas Lochbrunner, Korbinian PrauseGND, Johannes Büttner, Michael Layh |
|---|---|
| Parent Title (English): | Proceedings Volume 12893, Photonic Instrumentation Engineering XI |
| Publisher: | SPIE |
| Place of publication: | Bellingham, WA |
| Document Type: | conference proceeding (article) |
| Conference: | SPIE OPTO 2024, 18.08.24 - 22.08.24, San Francisco, California, United States |
| Language: | English |
| Date of Publication (online): | 2024/03/11 |
| Year of first Publication: | 2024 |
| GND Keyword: | Light sources; Optical filters; Tunable filters |
| Issue: | 128930Y |
| Number of pages: | 7 Seiten |
| First Page: | 1 |
| Last Page: | 7 |
| DOI of the original publication: | 10.1117/12.3000435 |
| ISBN: | 978-1-5106-7046-4 OPAC HS OPAC extern |
| ISBN: | 978-1-5106-7047-1 OPAC HS OPAC extern |
| Institutes: | Fakultät Maschinenbau |
| IMS - Institut für Maschinelles Sehen | |
| Promotionszentrum | |
| Research focus: | FSP2: Mobilität |
| FSP3: Produktion | |
| Publication Lists: | Layh, Michael |
| Prause, Korbinian | |
| Büttner, Johannes | |
| Lochbrunner, Jonas | |
| DFG subject classification: | 4 Ingenieurwissenschaften / 44 Informatik, System- und Elektrotechnik |
| Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 60 Technik |
| Publication reviewed: | peer review |
| Release Date: | 2024/03/26 |
| Frontdoor-URL: | https://opus4.kobv.de/opus4-hs-kempten/2182 |
