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Advantages and limits of spectrometer free areal chromatic confocal metrology

  • The spectrometer free areal chromatic confocal metrology (ChromaCAM) is an optical 3D surface measurement technology, which allows a simultaneous measurement of a large array of measuring points within a single exposure. In this work, we investigate the accuracy of a first prototype sensor system utilizing this new singleshot 3D measurement technique. It is found that surface height measurement errors smaller 1μm within a total measurement range of about 1000 μm are achievable. Furthermore, several influential factors are investigated showing the advantages and limits of the presented system. Investigating different surface materials it is found that frame rates up to approximately 800 fps for highly reflecting surfaces and up to 30 fps for ceramics, aluminum, and plastics are achievable.

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Author:Johannes Büttner, Korbinian PrauseGND, Michael Layh
DOI:https://doi.org/10.1117/12.3000433
Parent Title (English):Photonic Instrumentation Engineering XI
Publisher:SPIE
Place of publication:Bellingham, WA
Document Type:conference proceeding (article)
Conference:SPIE OPTO 2024, 18.08.24 - 22.08.24, San Francisco, California, United States
Language:English
Date of Publication (online):2024/03/11
Year of first Publication:2024
Tag:CMOS sensors; Confocal Metrology; Microlens array
Issue:12893
Number of pages:8 Seiten
First Page:1
Last Page:8
Institutes:IMS - Institut für Maschinelles Sehen
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 60 Technik
Research focus:FSP2: Mobilität
FSP3: Produktion
Publication Lists:Layh, Michael
Prause, Korbinian
Büttner, Johannes
Publication reviewed:begutachtet
Release Date:2024/03/26
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