Advantages and limits of spectrometer free areal chromatic confocal metrology
- The spectrometer free areal chromatic confocal metrology (ChromaCAM) is an optical 3D surface measurement technology, which allows a simultaneous measurement of a large array of measuring points within a single exposure. In this work, we investigate the accuracy of a first prototype sensor system utilizing this new singleshot 3D measurement technique. It is found that surface height measurement errors smaller 1μm within a total measurement range of about 1000 μm are achievable. Furthermore, several influential factors are investigated showing the advantages and limits of the presented system. Investigating different surface materials it is found that frame rates up to approximately 800 fps for highly reflecting surfaces and up to 30 fps for ceramics, aluminum, and plastics are achievable.
Author: | Johannes Büttner, Korbinian PrauseGND, Michael Layh |
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DOI: | https://doi.org/10.1117/12.3000433 |
Parent Title (English): | Photonic Instrumentation Engineering XI |
Publisher: | SPIE |
Place of publication: | Bellingham, WA |
Document Type: | conference proceeding (article) |
Conference: | SPIE OPTO 2024, 18.08.24 - 22.08.24, San Francisco, California, United States |
Language: | English |
Date of Publication (online): | 2024/03/11 |
Year of first Publication: | 2024 |
Tag: | CMOS sensors; Confocal Metrology; Microlens array |
Issue: | 12893 |
Number of pages: | 8 Seiten |
First Page: | 1 |
Last Page: | 8 |
Institutes: | IMS - Institut für Maschinelles Sehen |
Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 60 Technik |
Research focus: | FSP2: Mobilität |
FSP3: Produktion | |
Publication Lists: | Layh, Michael |
Prause, Korbinian | |
Büttner, Johannes | |
Publication reviewed: | begutachtet |
Release Date: | 2024/03/26 |