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Single-shot high speed aerial chromatic confocal metrology sensor

  • Chromatic confocal metrology is a widely established optical metrology technique, that allows for non-contact high-speed three-dimensional surface profiling without the need of mechanical depth scanning. However current methods are limited by the use of some sort of surface scanning method with mechanically moving parts. Furthermore the setups involve a spectrometer setup, either through prisms, gratings or multi-spectral cameras. This drastically limits the simultaneously measureable positions in lateral direction, as the spectrometer setup will utilize one spatial dimension for the wavelength domain. We present a novel method for chromatic confocal metrology, that enables high-speed and high resolution one-shot aerial surface metrology. This method is scalable with respect to measurement range in axial as well as in lateral direction and in the number of measurement points that can be measured simultaneously. After deriving the theoretical basis of the approach a virtual optical design with a FOV of 10mm by 10mm and a depth rangeChromatic confocal metrology is a widely established optical metrology technique, that allows for non-contact high-speed three-dimensional surface profiling without the need of mechanical depth scanning. However current methods are limited by the use of some sort of surface scanning method with mechanically moving parts. Furthermore the setups involve a spectrometer setup, either through prisms, gratings or multi-spectral cameras. This drastically limits the simultaneously measureable positions in lateral direction, as the spectrometer setup will utilize one spatial dimension for the wavelength domain. We present a novel method for chromatic confocal metrology, that enables high-speed and high resolution one-shot aerial surface metrology. This method is scalable with respect to measurement range in axial as well as in lateral direction and in the number of measurement points that can be measured simultaneously. After deriving the theoretical basis of the approach a virtual optical design with a FOV of 10mm by 10mm and a depth range of 1.5mm with roughly 1000 measurement points, based mainly on off-the-shelf components will be presented. This virtual system design was used to perform various simulations and explain the design process and considerations as well as the expected system response of the proposed system.show moreshow less

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Metadaten
Author:Korbinian Prause, Bernd R. PinzerORCiD, Alois HerkommerORCiDGND, Michael Layh
DOI:https://doi.org/10.1117/1.OE.60.12.124110
Identifier:1560-2303 OPAC HS OPAC extern
Parent Title (English):Optical Engineering
Publisher:SPIE
Place of publication:Bellingham
Document Type:Article
Language:English
Date of Publication (online):2021/12/24
Year of first Publication:2021
Volume:60
Issue:12
Article Number:124110
Number of pages:12 Seiten
First Page:1
Last Page:12
Institutes:IMS - Institut für Maschinelles Sehen
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften
Research focus:FSP2: Mobilität
FSP3: Produktion
Eigenständige Forschungsfelder
Publication Lists:Layh, Michael
Pinzer, Bernd
Prause, Korbinian
Publication reviewed:begutachtet
Release Date:2022/02/11
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