TY  - CONF
A1  - Lochbrunner, Jonas
A1  - Prause, Korbinian
A1  - Büttner, Johannes
A1  - Layh, Michael
T1  - Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology
T2  - Proceedings Volume 12893, Photonic Instrumentation Engineering XI
N2  - The spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This work investigates the impact of the spectral composition and light power of the light source on the sensitivity and accuracy of this method. A thorough optimization of the light source will be conducted, demonstrating the impact of various spectral compositions and light source power on the system performance, taking into account the system-related etendue. In addition, the optimization of the spectral transmission filter used in the optical spectral analysis unit and its influence on the accuracy and sensitivity of the system over the entire measurement range is shown.
KW  - Light sources
KW  - Optical filters
KW  - Tunable filters
Y1  - 2024
UR  - https://opus4.kobv.de/opus4-hs-kempten/frontdoor/index/index/docId/2182
SN  - 978-1-5106-7046-4
SN  - 978-1-5106-7047-1
IS  - 128930Y
SP  - 1
EP  - 7
PB  - SPIE
CY  - Bellingham, WA
ER  -