@article{PrausePinzerHerkommeretal.2021, author = {Korbinian Prause and Bernd R. Pinzer and Alois Herkommer and Michael Layh}, title = {Single-shot high speed aerial chromatic confocal metrology sensor}, journal = {Optical Engineering}, volume = {60}, number = {12}, pages = {1 -- 12}, doi = {10.1117/1.OE.60.12.124110}, year = {2021}, }