TY - JOUR A1 - Meindlhumer, Michael A1 - Ziegelwanger, Tobias A1 - Grau, Jakob A1 - Sternschulte, Hadwig A1 - Sztucki, Michael A1 - Steinmüller-Nethl, Doris A1 - Keckes, Jozef T1 - Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses JF - Journal of Vacuum Science & Technology A KW - micromechanics KW - diamond KW - thin films KW - synchrotrons Y1 - 2024 U6 - https://doi.org/10.1116/6.0003235 SN - 1520-8559 VL - 42 IS - 2024,2 ER -