@article{MeindlhumerZiegelwangerGrauetal., author = {Meindlhumer, Michael and Ziegelwanger, Tobias and Grau, Jakob and Sternschulte, Hadwig and Sztucki, Michael and Steinm{\"u}ller-Nethl, Doris and Keckes, Jozef}, title = {Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses}, series = {Journal of Vacuum Science \& Technology A}, volume = {42}, journal = {Journal of Vacuum Science \& Technology A}, number = {2024,2}, issn = {1520-8559}, doi = {10.1116/6.0003235}, pages = {12}, language = {en} }