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A femtosecond laser is used for selective structuring of biocompatible sensorchips consisting of a Ta2O5/Pt layer system on glass substrate. It was observed, that for low fluences the Ta2O5 can be selectively lifted-off from the Pt, while high fluences enable a removal of both layers. The underlying physical effects are investigated by pump-probe microscopy allowing the observation of the whole ablation process ranging temporally from femtoseconds to microseconds. Results show the formation of a gas-liquid mixture at 3 ps, causing the Ta2O5 to bulge after some ns. The Ta2O5 is disrupted in small particles after 50 ns.