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Ultra-fast movies resolve ultra-short pulse laser ablation and bump formation on thin Molybdenum films

  • For the monolithic serial interconnection of CIS thin film solar cells, 470 nm molybdenum films on glass substrates must be separated galvanically. The single pulse ablation with a 660 fs laser at a wavelength of 1053 nm is investigated in a fluence regime from 0.5 to 5.0 J/cm². At fluences above 2.0 J/cm² bump and jet formation can be observed that could be used for creating microstructures. For the investigation of the underlying mechanisms of the laser ablation process itself as well as of the bump or jet formation, pump probe microscopy is utilized to resolve the transient ablation behavior.

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Metadaten
Author:Matthias DomkeORCiD, Stephan Rapp, Heinz Paul HuberORCiD
URN:urn:nbn:de:bvb:m347-opus-2902
DOI:https://doi.org/10.1016/j.phpro.2012.10.093
Parent Title (English):Physics Procedia
Document Type:Article
Language:English
Date of Publication (online):2022/01/20
Year of first Publication:2012
Publishing Institution:Hochschule für angewandte Wissenschaften München
Release Date:2022/01/20
GND Keyword:LaserablationGND; Dünne SchichtGND; ImpulslaserGND; MolybdänGND; Pump-Probe-TechnikGND
Volume:39
Page Number:9
First Page:717
Last Page:725
Note:
Open access under a Creative Commons license (CC BY-NC-ND 3.0). - Sonderdruck aus: Physics Procedia, 39 (2012) 717–725, https://doi.org/10.1016/j.phpro.2012.10.093
Departments and Institutes:Fakultäten der Hochschule München / FK 06 Fakultät für angewandte Naturwissenschaften und Mechatronik
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 67 Industrielle Fertigung
Illustrations:Illustration/en
Illustrations:grafische Darstellung/en
Licence (German):Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International
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