Ultra-fast movies resolve ultra-short pulse laser ablation and bump formation on thin Molybdenum films
- For the monolithic serial interconnection of CIS thin film solar cells, 470 nm molybdenum films on glass substrates must be separated galvanically. The single pulse ablation with a 660 fs laser at a wavelength of 1053 nm is investigated in a fluence regime from 0.5 to 5.0 J/cm². At fluences above 2.0 J/cm² bump and jet formation can be observed that could be used for creating microstructures. For the investigation of the underlying mechanisms of the laser ablation process itself as well as of the bump or jet formation, pump probe microscopy is utilized to resolve the transient ablation behavior.
Author: | Matthias DomkeORCiD, Stephan Rapp, Heinz Paul HuberORCiD |
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URN: | urn:nbn:de:bvb:m347-opus-2902 |
DOI: | https://doi.org/10.1016/j.phpro.2012.10.093 |
Parent Title (English): | Physics Procedia |
Document Type: | Article |
Language: | English |
Date of Publication (online): | 2022/01/20 |
Year of first Publication: | 2012 |
Publishing Institution: | Hochschule für angewandte Wissenschaften München |
Release Date: | 2022/01/20 |
GND Keyword: | LaserablationGND; Dünne SchichtGND; ImpulslaserGND; MolybdänGND; Pump-Probe-TechnikGND |
Volume: | 39 |
Page Number: | 9 |
First Page: | 717 |
Last Page: | 725 |
Note: | Open access under a Creative Commons license (CC BY-NC-ND 3.0). - Sonderdruck aus: Physics Procedia, 39 (2012) 717–725, https://doi.org/10.1016/j.phpro.2012.10.093 |
Departments and Institutes: | Fakultäten der Hochschule München / FK 06 Fakultät für angewandte Naturwissenschaften und Mechatronik |
Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 67 Industrielle Fertigung |
Illustrations: | Illustration/en |
Illustrations: | grafische Darstellung/en |
Licence (German): | Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International |