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Sensitivity recalibration of MEMS microphones to compensate drift and environmental influences : 30th Eurosensors Conference, EUROSENSORS 2016

  • In this paper a new method for sensitivity recalibration of capacitive MEMS microphones is presented. Recalibration can be applied to compensate ageing or environmental influences. Recalibration can be done by measuring the sensitivity for only one bias voltage after a stress test. A microphone with a variable bias voltage can measure its pull-in voltage. Unfortunately, the drift of the pull-in voltage does not correlate with the sensitivity drift. So a true self-calibration without a defined acoustical test signal was impossible.

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Metadaten
Author:Sebastian Walser, M. Loibl, Matthias Winter, Christian Siegel, Gregor FeiertagORCiD
URN:urn:nbn:de:bvb:m347-dtl-0000000956
DOI:https://doi.org/https://doi.org/10.1016/j.proeng.2016.11.508
Parent Title (English):Procedia Engineering 168 (2016)
Publisher:Elsevier Ltd.
Document Type:Article
Language:English
Date of Publication (online):2022/02/14
Year of first Publication:2016
Publishing Institution:Hochschule für angewandte Wissenschaften München
Contributing Corporation:30th Eurosensors Conference, EUROSENSORS 2016
Release Date:2022/02/14
GND Keyword:MEMSGND; MikrofonGND
Page Number:4
First Page:1759
Last Page:1762
Note:
Sonderdruck aus: Procedia Engineering; Vol. 168 (2016), Seiten 1759-1762
Departments and Institutes:Fakultäten der Hochschule München / FK 04 Fakultät für Elektrotechnik und Informationstechnik
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 60 Technik
Illustrations:Illustration/en
Illustrations:grafische Darstellung/en
Licence (German):Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International
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