Sensitivity recalibration of MEMS microphones to compensate drift and environmental influences : 30th Eurosensors Conference, EUROSENSORS 2016
- In this paper a new method for sensitivity recalibration of capacitive MEMS microphones is presented. Recalibration can be applied to compensate ageing or environmental influences. Recalibration can be done by measuring the sensitivity for only one bias voltage after a stress test. A microphone with a variable bias voltage can measure its pull-in voltage. Unfortunately, the drift of the pull-in voltage does not correlate with the sensitivity drift. So a true self-calibration without a defined acoustical test signal was impossible.
Author: | Sebastian Walser, M. Loibl, Matthias Winter, Christian Siegel, Gregor FeiertagORCiD |
---|---|
URN: | urn:nbn:de:bvb:m347-dtl-0000000956 |
DOI: | https://doi.org/https://doi.org/10.1016/j.proeng.2016.11.508 |
Parent Title (English): | Procedia Engineering 168 (2016) |
Publisher: | Elsevier Ltd. |
Document Type: | Article |
Language: | English |
Date of Publication (online): | 2022/02/14 |
Year of first Publication: | 2016 |
Publishing Institution: | Hochschule für angewandte Wissenschaften München |
Contributing Corporation: | 30th Eurosensors Conference, EUROSENSORS 2016 |
Release Date: | 2022/02/14 |
GND Keyword: | MEMSGND; MikrofonGND |
Page Number: | 4 |
First Page: | 1759 |
Last Page: | 1762 |
Note: | Sonderdruck aus: Procedia Engineering; Vol. 168 (2016), Seiten 1759-1762 |
Departments and Institutes: | Fakultäten der Hochschule München / FK 04 Fakultät für Elektrotechnik und Informationstechnik |
Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 60 Technik |
Illustrations: | Illustration/en |
Illustrations: | grafische Darstellung/en |
Licence (German): | ![]() |