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A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming

  • This paper describes a novel method for trimming a low noise, differential micro-electromechanical system (MEMS) microphone with a state of the art signal to noise ratio (SNR) of 66 dB(A) and a sensitivity of -38 dBV/Pa @ 1 kHz after completing the fabrication process. The method allows compensating the electroacoustic variations caused by process tolerances and reducing specification limits of the microphone sensitivity from ±3 dB to ±0.5 dB. Trimming is done by programming the bias supply voltage of the capacitive membrane-backplate-system and the gain factor of the output pre-amplifier. Microphone sensitivity can be modified within a range of 11.2 dB. Thus the standard deviation of the sensitivity of a production batch could be reduced from 0.97 dB to 0.11 dB. Furthermore the SNR could be increased to 66.5 dB(A).

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Metadaten
Author:Sebastian Walser, Christian Siegel, Matthias Winter, G. Rocca, Anton Leidl, Gregor FeiertagORCiD
URN:urn:nbn:de:bvb:m347-dtl-0000000932
DOI:https://doi.org/https://doi.org/10.1016/j.proeng.2015.08.611
Parent Title (English):Procedia Engineering 120 (2015)
Publisher:Elsevier Ltd.
Document Type:Article
Language:English
Date of Publication (online):2022/02/14
Date of first Publication:2015/09/11
Publishing Institution:Hochschule für angewandte Wissenschaften München
Release Date:2022/02/14
GND Keyword:MEMSGND; MikrofonGND
Page Number:4
First Page:206
Last Page:209
Note:
Sonderdruck aus: Procedia Engineering; Vol. 120 (2015), Seiten 206-209
Departments and Institutes:Fakultäten der Hochschule München / FK 04 Fakultät für Elektrotechnik und Informationstechnik
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 60 Technik
Illustrations:Illustration/en
Illustrations:grafische Darstellung/en
Licence (German):Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International
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