A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming
- This paper describes a novel method for trimming a low noise, differential micro-electromechanical system (MEMS) microphone with a state of the art signal to noise ratio (SNR) of 66 dB(A) and a sensitivity of -38 dBV/Pa @ 1 kHz after completing the fabrication process. The method allows compensating the electroacoustic variations caused by process tolerances and reducing specification limits of the microphone sensitivity from ±3 dB to ±0.5 dB. Trimming is done by programming the bias supply voltage of the capacitive membrane-backplate-system and the gain factor of the output pre-amplifier. Microphone sensitivity can be modified within a range of 11.2 dB. Thus the standard deviation of the sensitivity of a production batch could be reduced from 0.97 dB to 0.11 dB. Furthermore the SNR could be increased to 66.5 dB(A).
Author: | Sebastian Walser, Christian Siegel, Matthias Winter, G. Rocca, Anton Leidl, Gregor FeiertagORCiD |
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URN: | urn:nbn:de:bvb:m347-dtl-0000000932 |
DOI: | https://doi.org/https://doi.org/10.1016/j.proeng.2015.08.611 |
Parent Title (English): | Procedia Engineering 120 (2015) |
Publisher: | Elsevier Ltd. |
Document Type: | Article |
Language: | English |
Date of Publication (online): | 2022/02/14 |
Date of first Publication: | 2015/09/11 |
Publishing Institution: | Hochschule für angewandte Wissenschaften München |
Release Date: | 2022/02/14 |
GND Keyword: | MEMSGND; MikrofonGND |
Page Number: | 4 |
First Page: | 206 |
Last Page: | 209 |
Note: | Sonderdruck aus: Procedia Engineering; Vol. 120 (2015), Seiten 206-209 |
Departments and Institutes: | Fakultäten der Hochschule München / FK 04 Fakultät für Elektrotechnik und Informationstechnik |
Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 60 Technik |
Illustrations: | Illustration/en |
Illustrations: | grafische Darstellung/en |
Licence (German): | ![]() |