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Determining the acoustic resistance of small sound holes for MEMS microphones : Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece

  • Capacitive MEMS microphones are now widely used for mobile phones and headsets. The frequency response of MEMS microphones is influenced by the package geometry. This can be applied to tune the performance of the microphone in the system. Packages with small sound inlet holes are acoustic low-pass filters. The cut-off frequency is determined by the diameter of the holes. In previous work we did not find sufficient agreement between a lumped element simulation and the measured frequency response of the microphones. Now we measured the acoustic resistance of small sound inlet holes directly. The measured resistances agree well with calculated values. The frequency response of MEMS microphones was measured for different sound hole diameters and lengths. The results are in good agreement with calculated transfer functions of the package.

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Metadaten
Author:Gregor FeiertagORCiD, Matthias Winter, Petko Bakardjiev, Elmar Schröder, Christian Siegel, Mustafa Yusufi, Peter Iskra, Anton Leidl
URN:urn:nbn:de:bvb:m347-dtl-0000000905
DOI:https://doi.org/https://doi.org/10.1016/j.proeng.2011.12.373
Parent Title (English):Procedia Engineering
Publisher:Elsevier Ltd.
Document Type:Article
Language:English
Date of Publication (online):2022/02/04
Year of first Publication:2011
Publishing Institution:Hochschule für angewandte Wissenschaften München
Contributing Corporation:Eurosensors XXV, 4.-7. September 2011, Athen
Release Date:2022/02/04
GND Keyword:MEMSGND; MikrofonGND
Page Number:4
First Page:1509
Last Page:1512
Departments and Institutes:Fakultäten der Hochschule München / FK 04 Fakultät für Elektrotechnik und Informationstechnik
Illustrations:grafische Darstellung/en
Licence (German):Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International
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