TY - JOUR A1 - Walser, Sebastian A1 - Siegel, Christian A1 - Winter, Matthias A1 - Rocca, G. A1 - Leidl, Anton A1 - Feiertag, Gregor T1 - A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming T2 - Procedia Engineering 120 (2015) N2 - This paper describes a novel method for trimming a low noise, differential micro-electromechanical system (MEMS) microphone with a state of the art signal to noise ratio (SNR) of 66 dB(A) and a sensitivity of -38 dBV/Pa @ 1 kHz after completing the fabrication process. The method allows compensating the electroacoustic variations caused by process tolerances and reducing specification limits of the microphone sensitivity from ±3 dB to ±0.5 dB. Trimming is done by programming the bias supply voltage of the capacitive membrane-backplate-system and the gain factor of the output pre-amplifier. Microphone sensitivity can be modified within a range of 11.2 dB. Thus the standard deviation of the sensitivity of a production batch could be reduced from 0.97 dB to 0.11 dB. Furthermore the SNR could be increased to 66.5 dB(A). KW - MEMS KW - Mikrofon Y1 - 2022 UR - https://opus4.kobv.de/opus4-hm/frontdoor/index/index/docId/378 UR - https://nbn-resolving.org/urn:nbn:de:bvb:m347-dtl-0000000932 N1 - Sonderdruck aus: Procedia Engineering; Vol. 120 (2015), Seiten 206-209 SP - 206 EP - 209 PB - Elsevier Ltd. ER -