@article{WalserSiegelWinteretal.2022, author = {Sebastian Walser and Christian Siegel and Matthias Winter and G. Rocca and Anton Leidl and Gregor Feiertag}, title = {A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming}, journal = {Procedia Engineering 120 (2015)}, pages = {206 -- 209}, doi = {https://doi.org/10.1016/j.proeng.2015.08.611}, year = {2022}, }