TY - JOUR A1 - Dickow, Andreas A1 - Feiertag, Gregor T1 - A Framework for Calibration of Barometric MEMS Pressure Sensors : EUROSENSORS 2014, the XXVIII edition of the conference series T2 - Procedia Engineering 87 (2014) N2 - Barometric MEMS pressure sensors must be calibrated at several temperatures and pressures. The fewer calibration points are needed to fulfill a sensor specification, the faster sensor production is. This paper proposes a polynomial approach for determining optimal sensor calibration, using the minimum number of calibration points necessary. In an experiment the framework is applied to the following sensor types: Bosch BMP085, Bosch BMP180, and EPCOS T5400. Influences of temperature operation range and pressure range are discussed in the experiment. Further, optimal calibration point suggestions are identified. KW - Drucksensor KW - MEMS Y1 - 2022 UR - https://opus4.kobv.de/opus4-hm/frontdoor/index/index/docId/377 UR - https://nbn-resolving.org/urn:nbn:de:bvb:m347-dtl-0000000928 N1 - Sonderdruck aus: Procedia Engineering 87 (20154), Seiten 1350-1353 SP - 1350 EP - 1353 PB - Elsevier Ltd. ER -