TY - JOUR A1 - Walser, Sebastian A1 - Loibl, M. A1 - Winter, Matthias A1 - Siegel, Christian A1 - Feiertag, Gregor T1 - Sensitivity recalibration of MEMS microphones to compensate drift and environmental influences : 30th Eurosensors Conference, EUROSENSORS 2016 T2 - Procedia Engineering 168 (2016) N2 - In this paper a new method for sensitivity recalibration of capacitive MEMS microphones is presented. Recalibration can be applied to compensate ageing or environmental influences. Recalibration can be done by measuring the sensitivity for only one bias voltage after a stress test. A microphone with a variable bias voltage can measure its pull-in voltage. Unfortunately, the drift of the pull-in voltage does not correlate with the sensitivity drift. So a true self-calibration without a defined acoustical test signal was impossible. KW - MEMS KW - Mikrofon Y1 - 2022 UR - https://opus4.kobv.de/opus4-hm/frontdoor/index/index/docId/380 UR - https://nbn-resolving.org/urn:nbn:de:bvb:m347-dtl-0000000956 N1 - Sonderdruck aus: Procedia Engineering; Vol. 168 (2016), Seiten 1759-1762 SP - 1759 EP - 1762 PB - Elsevier Ltd. ER -