@article{FeiertagSaxWaberetal.2022, author = {Gregor Feiertag and M. Sax and Tobias Waber and Wolfgang Pahl and S. Stufle and Anton Leidl}, title = {Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package}, journal = {Journal of Sensors and Sensor Systems}, pages = {168 -- 175}, doi = {10.5194/jsss-3-167-2014}, year = {2022}, }