@article{FeiertagPahlWinteretal.2022, author = {Gregor Feiertag and Wolfgang Pahl and Matthias Winter and Anton Seidl and Stefan Seitz and Christian Siegel and Andreas Beer}, title = {Flip chip MEMS microphone package with large acoustic reference volume}, journal = {Procedia Engineering}, pages = {355 -- 358}, doi = {10.1016/j.proeng.2010.09.121}, year = {2022}, }