@inproceedings{KettelgerdesMezmerHaeussleretal.2023, author = {Kettelgerdes, Marcel and Mezmer, Peter and Haeussler, Michael J. and B{\"o}ttger, Gunnar and Tavakolibasti, Majid and Pandey, Amit and Erdogan, H{\"u}seyin and Elger, Gordon and Schacht, Ralph and Wunderle, Bernhard}, title = {Realization, multi-field coupled simulation and characterization of a thermo-mechanically robust LiDAR front end on a copper coated glass substrate}, booktitle = {Proceedings: IEEE 73rd Electronic Components and Technology Conference, ECTC 2023}, publisher = {IEEE}, address = {Piscataway}, isbn = {979-8-3503-3498-2}, issn = {2377-5726}, doi = {https://doi.org/10.1109/ECTC51909.2023.00131}, pages = {753 -- 760}, year = {2023}, language = {en} }