TY - CONF A1 - Rahiman, M. Fuad A1 - Berndt, Dominik A1 - Schreiner, Rupert A2 - Artem, Ivanov A2 - Marc, Bicker A2 - Peter, Patzelt T1 - Micro-wire Pirani with temperature-stabilized Environment T2 - Tagungsband 3. Symposium Elektronik und Systemintegration ESI N2 - We present a Pirani vacuum gauge with an actively temperature-stabilized environment. The heated sensor element is surrounded by two elements that are temperaturecontrolled to a certain level below the temperature of the heated sensor element. The idea is to create a homogeneous temperature distribution, which allows keeping the ambient temperature constant, thus increasing the accuracy and repeatability of vacuum measurements. Y1 - 2022 UR - https://opus4.kobv.de/opus4-haw-landshut/frontdoor/index/index/docId/361 UR - https://nbn-resolving.org/urn:nbn:de:bvb:860-opus4-3614 SN - 978-3-9818439-6-5 N1 - Die Konferenzveröffentlichung erschien im Tagungsband zum 3. Symposium Elektronik und Systemintegration ESI 2022 am 06. April 2022 an der Hochschule Landshut. Hrsg.: Artem Ivanov, Marc Bicker und Peter Patzelt. Hochschule Landshut, 2022. ISBN 978-3-981439-6-5 SP - 52 EP - 59 ER -