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Metallic coatings are essential for numerous optical systems due to their high and broadband refl ectivity in the infrared spectral range. In contrast to well-established (protected)silver and gold mirror coatings, iridium is environmentally durable, referring to ISO 9211-3 and thermally stable up to 600 °C even without protective layers, as demonstrated. Additionally,the optical and related structural properties of atomic layer deposited (ALD) and magnetron sputtered (MS) Ir coatings were investigated using spectrophotometry, FTIR, ellipsometry, WLI, AFM, XRR, XRD, SEM, and electrical resistivity measurements. The properties of Ir ALD and Ir MS coatings diff er due to their topography and microstructure.
Metallic coatings are essential for numerous optical systems due to their high and broadband refl ectivity in the infrared spectral range. In contrast to well-established (protected)silver and gold mirror coatings, iridium is environmentally durable, referring to ISO 9211-3 and thermally stable up to 600 °C even without protective layers, as demonstrated. Additionally,the optical and related structural properties of atomic layer deposited (ALD) and magnetron sputtered (MS) Ir coatings were investigated using spectrophotometry, FTIR, ellipsometry, WLI,AFM, XRR, XRD, SEM, and electrical resistivity measurements. The properties of Ir ALD and Ir MS coatings diff er due to their topography and microstructure.
Das Edelmetall Iridium ist hart; extrem dicht; thermisch, mechanisch und chemisch stabil; weist eine hohe Reflektivität im mittleren und fernen Infrarot auf und hat eine hohe Beständigkeit gegenüber Umwelteinflüssen - auch ohne weitere Schutzschichten. Es wurden die komplexen Brechungsindizes für Iridium-Spiegelbeschichtungen bestimmt, welche vorhandene Literaturwerte ergänzen.
Hochreflektierende Metallbeschichtungen sind essenziell für zahlreiche optische Elemente. Bewährte Spiegelbeschichtungen aus Silber und Gold bieten eine hohe und breitbandige Eigenreflexion im infraroten Spektralbereich, sind ohne geeignete Schutzschichten jedoch anfällig gegenüber Umwelteinflüssen und mechanischer Beanspruchung. Insbesondere im langwelligen Spektralbereich verringern die Absorptionsbanden dieser Schutzschichten teilweise die hohe Spiegelreflektivität wieder. Das Edelmetall Iridium (Ir) ist hart; extrem dicht; thermisch, mechanisch und chemisch stabil; weist eine ähnlich hohe Reflektivität im mittleren und fernen Infrarot, wie Silber und Gold, auf und hat zusätzlich eine hohe Beständigkeit gegenüber Umwelteinflüssen - auch ohne Schutzschichten. In diesem Beitrag werden die optischen und strukturellen Eigenschaften von Iridium-Spiegelbeschichtungen, welche mittels Atomlagenabscheidung (ALD) und DC-Magnetron-Sputtern hergestellt wurden, vorgestellt und miteinander verglichen. Die komplexen Brechungsindizes für ALD-erzeugte und gesputterte Iridium-Spiegelbeschichtungen wurden für Wellenlängen von 200 nm bis 20 μm bestimmt, welche nun bereits vorhandene Literaturwerte ergänzen.
Highly reflective metal coatings are essential for numerous optical elements. Established mirror coatings made of silver (Ag) and gold (Au) offer high and broadband self-reflection in the infrared (IR) spectral range but are susceptible to
environmental influences and mechanical stress without suitable protective layers. In the long-wavelength spectral range, in particular, the absorption bands of these protective layers partially reduce the high mirror reflectivity again. However,
the noble metal iridium (Ir) is hard, extremely dense, and thermally, mechanically, and chemically stable. Iridium
provides a similarly high reflectivity in the mid (MIR) and far-infrared (FIR) spectral range, as silver and gold, and high resistance to environmental influences - even without protective layers. In this paper, the different deposition processes, as well as the optical and structural properties of iridium mirror coatings fabricated by atomic layer deposition (ALD)
and by magnetron sputtering (MS), are presented and compared with each other. The complex refractive indices for ALD and MS deposited iridium mirror coatings were determined for wavelengths from 200 nm to 20 μm, complementing the existing literature values. We demonstrate that iridium mirror coatings offer a high and broadband reflectivity from the mid to far-infrared spectral range. In contrast to established – protected – silver and gold mirror coatings, the iridium
coatings are environmentally durable and thermally stable up to 600 °C, even without protective layers. Therefore, as an interesting mirror coating material, iridium has the potential for special applications in infrared astronomy and probably
also for industrial instruments.