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Labor/Institute
- BIOMEMS Lab (1)
Keywords
- Iridium (3)
- X-ray (3)
- Mikrosystemtechnik (2)
- Röntgenteleskop (2)
- coating (2)
- iridium (2)
- mirror (2)
- Energy-Harvesting (1)
- Fusion Bonding (1)
- Lobster Eye (1)
Year of publication
- 2017 (5) (remove)
Document Type
- Article (2)
- Conference Proceeding (2)
- Other (1)
Language
- English (5)
In this work we present a new micro-system-technology based production process for
unipolar ferroelectrets. Theoretical analysis of the influence of the air-gap size on the electric
field distribution as well as on the induced charge on the electrodes shows superior performance
of unipolar piezoelectrets with small air-gaps. For the production of these small air-gaps we
developed a new design using a photoresist thermoforming master, an integrated micro-heater
and shadow masks for metallization. Unipolar piezoelectrets produced with this technology
exhibit increased d33-coefficients compared to designs in previous publications. These
piezoelectrets are highly preferable for energy-harvesting applications, as they promise high
electric power output.
MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance.
Future space-based X-ray observatories need to be very lightweight for launcher mass constraints. Therefore they will
use a reduced mirror thickness, which results in the additional requirement of low coating stress to avoid deformation of
the initial precisely shaped mirror substrates. Due to their excellent reflection properties iridium coatings are sometimes
applied for grazing incidence mirrors in astronomical X-ray telescopes. At Aschaffenburg University of Applied
Sciences the coating of thin iridium films by an RF-magnetron sputtering technique is under development. The work is
embedded in collaborations with the Max-Planck-Institute for Extraterrestrial Physics in Germany, the Czech Technical
University in Prague, the Osservatorio Astronomico di Brera in Italy, the German Leibniz Institute for Solid State and
Materials Research in Dresden, and the French Institute Fresnel. Sputtering with different parameters leads to iridium
films with different properties. The current work is focused on the microstructure of the iridium coatings to study the
influence of the substrate and of the argon gas pressure on the thin film growing process. Correlations between coating
density, surface micro-roughness, the crystalline structure of the iridium layers, and the expected reflectivity of the X-ray
mirror as well as coating stress effects are presented and discussed. The final goal of the project is to integrate the
produced prototype mirrors into an X-ray telescope module. On a longer timescale measurements of the mirror modules
optical performance are planned at the X-ray test facility PANTER.
X-ray astronomy uses space-based telescopes to overcome the disturbing absorption of the Earth´s atmosphere. The telescope mirrors are operating at grazing incidence angles and are coated with thin metal films of high-Z materials to get sufficient reflectivity for the high-energy radiation to be observed. In addition the optical payload needs to be light-weighted for launcher mass constrains. Within the project JEUMICO, an acronym for “Joint European Mirror Competence”, the Aschaffenburg University of Applied Sciences and the Czech Technical University in Prague started a collaboration to develop mirrors for X-ray telescopes. The X-ray telescopes currently developed within this Bavarian- Czech project are of Lobster eye type optical design. Corresponding mirror segments use substrates of flat silicon wafers which are coated with thin iridium films, as this material is promising high reflectivity in the X-ray range of interest. The deposition of the iridium films is based on a magnetron sputtering process. Sputtering with different parameters, especially by variation of the argon gas pressure, leads to iridium films with different properties. In addition to investigations of the uncoated mirror substrates the achieved surface roughness has been studied. Occasional delamination of the iridium films due to high stress levels is prevented by chromium sublayers. Thereby the sputtering parameters are optimized in the context of the expected reflectivity of the coated X-ray mirrors. In near future measurements of the assembled mirror modules optical performances are planned at an X-ray test facility.
Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings
(2017)
Reflective mirror coatings made of iridium are used in X-ray telescopes of the Chandra X-ray Observatory (CXO) launched in 1999 by the National Aeronautics and Space Administration (NASA) to investigate astronomical sources at photon energies below 10. keV. These coatings were produced in a DC magnetron sputtering process and have so far proven their suitability for space-based applications. We are considering in the present paper the processing of thin iridium films for lightweight telescopes using the radio frequency magnetron sputtering technique with an oblique angle deposition. The coating development presented here is focused on the influence of total sputtering pressure on film properties as well as on its impact on the mirror's performance. Characterisation methods such as X-ray diffractometry, X-ray reflectometry, atomic force microscopy and transmission electron microscopy have been used. Correlations between morphology, density, surface micro-roughness, crystal structure of the iridium layer and the expected reflectivity of the X-ray mirror are described and discussed.