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- BIOMEMS Lab (3)
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- Mikrosystemtechnik (3)
- Energy-Harvesting (1)
- Fusion Bonding (1)
- Kelvin-Sonde (1)
- MEMS (1)
- Micro-Heater (1)
- Nanodraht (1)
- Rasterkraftmikroskopie (1)
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- Teflon-FEP (1)
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- English (5)
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Multilayers of silicon oxide/silicon nitride/silicon oxide (ONO) are known for their good
electret properties due to deep energy traps near the material interfaces, facilitating charge
storage. However, measurement of the space charge distribution in such multilayers is a
challenge for conventional methods if layer thickness dimensions shrink below 1 μm. In this
paper, we propose an atomic force microscope based method to determine charge distributions in
ONO layers with spatial resolution below 100 nm. By applying Kelvin probe force microscopy
(KPFM) on freshly cleaved, corona-charged multilayers, the surface potential is measured
directly along the z-axis and across the interfaces. This new method gives insights into charge
distribution and charge movement in inorganic electrets with a high spatial resolution.
Nickel-iron (NiFe) nanowires with a high contentof nickel and large aspect-ratio show promising characteris-tics for applications in modern micro-systems. In this study,nanowires with well-controlled diameter, height and compo-sition are fabricated using nanoporous poly-carbonate (PC)and anodized aluminum-oxide (AAO) membranes. Differ-ences between potentiostatic and pulsed deposition methodswere studied with regard to their flexibility and a recommen-dation for the best use of the individual types is given. Withthe application of the presented processes, future technolo-gies as magnetic energy-harvesting or nano-fluxgate sensorscan be improved.
In this work we present a new micro-system-technology based production process for
unipolar ferroelectrets. Theoretical analysis of the influence of the air-gap size on the electric
field distribution as well as on the induced charge on the electrodes shows superior performance
of unipolar piezoelectrets with small air-gaps. For the production of these small air-gaps we
developed a new design using a photoresist thermoforming master, an integrated micro-heater
and shadow masks for metallization. Unipolar piezoelectrets produced with this technology
exhibit increased d33-coefficients compared to designs in previous publications. These
piezoelectrets are highly preferable for energy-harvesting applications, as they promise high
electric power output.
MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance.
Piezoelectrets fabricated from fluoroethylenepropylene (FEP)-foils have shown drastic increase of their piezoelectric
properties during the last decade. This led to the development of FEP-based energy harvesters, which are about to evolve
into a technology with a power-generation-capacity of milliwatt per square-centimeter at their resonance frequency. Recent
studies focus on piezoelectrets with solely negative charges, as they have a better charge stability and a better suitability for
implementation in rising technologies, like the internet of things (IOT) or portable electronics. With these developments
heading towards applications of piezoelectrets in the near future, there is an urgent need to also address the fabrication
process in terms of scalability, reproducibility and miniaturization. In this study, we firstly present a comprehensive review
of the literature for a deep insight into the research that has been done in the field of FEP-based piezoelectrets. For the first
time, we propose the employment of microsystem-technology and present a process for the fabrication of thermoformed
FEP piezoelectrets based on thermoforming SU-8 templates. Following this process, unipolar piezoelectrets were fabricated with air void dimensions in the range of 300–1000 lm in width and approx. 90 lm in height. For samples with a void
size of 1000 lm, a d33-coefficient up to 26,508 pC/N has been achieved, depending on the applied seismic mass. Finally,
the properties as energy harvester were characterized. At the best, an electrical power output of 0.51 mW was achieved for
an acceleration of 1 g with a seismic mass of 101 g. Such piezoelectrets with highly defined dimensions show good
energy output in relation to volume, with high potential for widespread applications.