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Labor/Institute
- BIOMEMS Lab (1)
Keywords
- Energy-Harvesting (1)
- Fusion Bonding (1)
- Micro-Heater (1)
- Mikrosystemtechnik (1)
- SU-8 (1)
- Teflon-FEP (1)
Year of publication
- 2017 (1)
Document Type
- Other (1)
Language
- English (1)
Has Fulltext
- yes (1)
MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance.