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Based on nonlinear absorption, we report on laser welding of cycloolefin copolymers without any additional absorption layer employing infrared femtosecond laser. To the best of our knowledge, this is the first report of ultrashort laser welding of this material class, revealing a remarkable high processing speed of 20 mm/s in a single pass mode. Using a 1028 nm laser having a pulse duration of 220 fs at a repetition rate of 571 kHz leads to a welding seam width between 38 and 137 μm, depending on the applied laser average power. The welded joint is characterized by a maximum shear strength of 40 MPa. The experimental results are compared to those reported for femtosecond laser welding of PMMA and to those published for using a Thulium fiber laser.
We report on laser generation of microchannels by focused femtosecond laser pulses inside PMMA bulk material. This process enables direct fabrication of three dimensional microfluidic channel architectures with generally unlimited channel length. Based on nonlinear ultrashort pulse laser absorption of high intensities around the focal volume, a material modification including a refractive index shift is triggered. After laser exposure the channel is created by a gaseous degradation of exposed areas during an annealing process. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stages, allowing freely chosen complex shaped channel architectures. In this report, the creation of inner lying vertical microchannels is examined. In addition to previously shown horizontal channel architectures vertical channels are necessary to fulfill the definition of an internal three-dimensional microfluidic structure and to create interconnections in multilevel lab on chip devices. The cross section and geometry of vertical channels are strongly influenced by laser parameters such as pulse duration, laser power and writing speed. The influence of these process parameters on the channels diameter is determined and parameters are optimized regarding a controllable, stable and reproducible process. The functionality of vertical microchannels as an interconnection between multilayer microfluidic devices is demonstrated using a Rhodamine B solution.
Vergleich der thermischen Eigenschaften unterschiedlicher insulated metal substrat-Leiterplatten
(2010)
We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W −1 min −1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm −2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here.
We report on the laser ablation of cyclic olefin copolymer using an amplified ultrashort pulsed laser in the ultraviolet spectral range. In addition to a high ablation depth per laser-structured layer up to 74 μm at a fluence of 22 J cm−2, an excellent mean roughness 𝑅𝑎
of laser-patterned surfaces down to 0.5 μm is demonstrated. Furthermore, with increasing fluence, increasing ablation efficiencies up to 2.5 mm3 W−1 min−1 are determined. Regarding the quality of the ablation, we observed steep ablation flanks and low debris formation, though for fluences above 10.5 J cm−2 the formation of troughs was observed, being attributed to multiple reflections on the ablation flanks. For comparison, laser ablation was performed under identical conditions with an infrared laser wavelength. The results highlight that UV ablation exhibits significant advantages in terms of ablation efficiency, surface roughness and quality. Moreover, our results show that a larger UV focus spot accelerates the ablation process with comparable quality, paving the way for high-power UV ultrashort pulsed lasers towards an efficient and qualitative tool for the laser machining of cyclic olefin copolymer. The production of complex microfluidics further underlines the suitability of this type of laser.
We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the
MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 % on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 % reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing.
We report on the joining of transparent thermoplastic polymers using infrared femtosecond laser pulses. Due to nonlinear absorption, the developed micro-welding process for cyclo-olefin copolymers does not require any intermediate absorbing layers or any surface pre-processing of the welding partners. In view of an optimized and stable micro-welding process, the influence of the welding speed and focal position on both, the quality and shear force strength are investigated. We highlight that welding seam widths of down to 65 µm are feasible for welding speeds of up to 75 mm/s. However, a variation of the welding speed affects the required focal position for a successful joining process. The shear force strength of the welding seam is determined to 37 MPa, which corresponds to 64% of the shear strength of the bulk material and is not affected by the welding speed.
This cover image outlines the fabrication method of a polymer planar Bragg grating electrified via femtosecond laser reductive sintering of CuO nanoparticles (see article number 2002203 by Stefan Kefer and co-workers). Based on this sophisticated methodology, bulk cyclic olefin copolymer substrates can be equipped with integrated photonic structures comprising a waveguide as well as a Bragg grating. Its reflective characteristics can be efficiently tuned by means of the subsequently generated Cu conducting path, whereas the applied femtosecond laser process enables an almost limitless degree of freedom towards conducting path geometries.
This contribution demonstrates and discusses electrically tunable polymer planar Bragg gratings based on bulk cyclic olefin copolymers. A lithographic single-writing-step method and femtosecond laser reductive sintering of copper(II) oxide nanoparticles are subsequently employed in order to generate buried photonic structures and copper conducting paths on top of the polymer substrate. This way, the necessary number of process steps for fabricating a planar polymer-based electro-optical device is greatly reduced. The response of a fully electrified grating structure follows temperature changes, induced by the copper conducting path, with sensitivities up to −31 pm K−1. Dilatometric measurements show that the specimen's behavior is correlated to the situationally reduced thermal expansion of the bulk polymer substrate. In consequence, the tuning response of the photonic platform follows a second order polynomial, whereas a direct current of 30 mA, which correlates to a power consumption of 18.3 mW, leads to a local temperature increase and a residual Bragg wavelength shift of 19.6 K and −547 pm, respectively. Moreover, the outstanding flexibility of the proposed fabrication concept is underlined by demonstrating alternative conducting path geometries, whereas one of the additional designs is adapted to control the spectral width of the Bragg grating's reflection peak.
While Bragg grating-based optical devices have shown promising performances for pressure sensing applications, their sensitivity, especially in the low-pressure regime, is unsatisfying and needs to be optimized by elaborate designs, such as cantilevers or other extrinsic mechanical transducers. This contribution demonstrates and discusses a novel concept for optical pressure sensors based on polymer planar Bragg gratings. Waveguide and Bragg grating are fabricated underneath the surface of a temperature-stable and humidity-insensitive cyclic olefin copolymer substrate by means of a femtosecond laser. Based on the employed direct-writing procedure, in combination with adaptive, in-situ beam shaping with a spatial light modulator, writing depth, i.e., location of the photonic structures within the substrate, as well as Bragg grating periodicity and positioning can be deliberately chosen. Afterwards, the polymer substrate is post-processed with a high-precision micro mill, so a diaphragm comprising the integrated photonic structures is generated. The resulting diaphragm exhibits a thickness of 300 µm and a diameter of 10 mm. Finally, the optical sensor is packaged and sealed to form an air-filled gas pocket underneath the diaphragm. Deformations of the diaphragm by external pressure changes translate to strain variations along the waveguide axis and thus perturb the Bragg grating period. This leads to changes in the grating’s wavelength of main reflection, which can be evaluated in order to quantify the relative external pressure. With this straightforward optical sensor concept, pressure sensitivities up to 39 pm kPa-1, within relative pressures ranges from 78 kPa to 372 kPa, are achieved.