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We report on the laser ablation of cyclic olefin copolymer using an amplified ultrashort pulsed laser in the ultraviolet spectral range. In addition to a high ablation depth per laser-structured layer up to 74 μm at a fluence of 22 J cm−2, an excellent mean roughness 𝑅𝑎
of laser-patterned surfaces down to 0.5 μm is demonstrated. Furthermore, with increasing fluence, increasing ablation efficiencies up to 2.5 mm3 W−1 min−1 are determined. Regarding the quality of the ablation, we observed steep ablation flanks and low debris formation, though for fluences above 10.5 J cm−2 the formation of troughs was observed, being attributed to multiple reflections on the ablation flanks. For comparison, laser ablation was performed under identical conditions with an infrared laser wavelength. The results highlight that UV ablation exhibits significant advantages in terms of ablation efficiency, surface roughness and quality. Moreover, our results show that a larger UV focus spot accelerates the ablation process with comparable quality, paving the way for high-power UV ultrashort pulsed lasers towards an efficient and qualitative tool for the laser machining of cyclic olefin copolymer. The production of complex microfluidics further underlines the suitability of this type of laser.
In this contribution, we report on the generation of internal microchannels with basically unlimited channel length inside of PMMA bulk material by femtosecond laser. A precisely controllable and stable circular channel cross section is obtained by using a spatial light modulator to compensate the writing depth depending spherical aberration. Furthermore, the generation of a rotatable elliptical input beam by adaptive optics ensures a fitting of the beam shaping to the writing direction. In this study, we report on both, the effect of the ellipticity of the input beam and the effect of a correction of the spherical aberration on the circularity of the resulting internal microchannels. Moreover, we demonstrate the application of this writing technique by creating microfluidic testing structures inside of a transparent standard polymer.
While Bragg grating-based optical devices have shown promising performances for pressure sensing applications, their sensitivity, especially in the low-pressure regime, is unsatisfying and needs to be optimized by elaborate designs, such as cantilevers or other extrinsic mechanical transducers. This contribution demonstrates and discusses a novel concept for optical pressure sensors based on polymer planar Bragg gratings. Waveguide and Bragg grating are fabricated underneath the surface of a temperature-stable and humidity-insensitive cyclic olefin copolymer substrate by means of a femtosecond laser. Based on the employed direct-writing procedure, in combination with adaptive, in-situ beam shaping with a spatial light modulator, writing depth, i.e., location of the photonic structures within the substrate, as well as Bragg grating periodicity and positioning can be deliberately chosen. Afterwards, the polymer substrate is post-processed with a high-precision micro mill, so a diaphragm comprising the integrated photonic structures is generated. The resulting diaphragm exhibits a thickness of 300 µm and a diameter of 10 mm. Finally, the optical sensor is packaged and sealed to form an air-filled gas pocket underneath the diaphragm. Deformations of the diaphragm by external pressure changes translate to strain variations along the waveguide axis and thus perturb the Bragg grating period. This leads to changes in the grating’s wavelength of main reflection, which can be evaluated in order to quantify the relative external pressure. With this straightforward optical sensor concept, pressure sensitivities up to 39 pm kPa-1, within relative pressures ranges from 78 kPa to 372 kPa, are achieved.
Microfluidic lab on chip systems require components to transport, mix, separate and analyse small volumes of different fluids. In this study, we report on the laser generation of internal hollow architectures created by focused 514 nm femtosecond laser pulses inside PMMA bulk material. Size and cross-sectional shape of a single internal generated microchannel are determined by the intensity distribution inside the focal voxel and can be controlled either by the numerical aperture of the focusing objective or by laser beam shaping. As both approaches are practically limited with respect to the realizable cross-sectional shapes, we present a process based on an internal hatching to expand the achievable channel cross-sections and thereby enable the possibility to create complex 3D shaped internal structures. This process is applied to create fully internal functional microfluidic elements such as mixers which are part of most polymer lab-on-chip systems.
We present an experimental study on fiber laser micromachining of 4H-SiC semiconductor. In particular, we optimize the process time for percussion drilling of 440 µm and 330 µm thick wafers with a minimum drilling time of, eg, 7.5 ms being achieved for 330 µm thick wafers. The drilled holes are characterized by a low taper, a high circularity and entry diameters of about 60 µm. For laser cutting, effective cutting speeds of 2 mm/s and 0.63 mm/s are obtained for 330 µm and 440 µm wafer thickness, respectively, with the cut kerf width being 65 µm. Both processes are associated with a good quality that is characterized by no chipping and cracks. The capability of the fiber laser based micromachining process is highlighted by cutting complex micrometer scale inner and outer contours into partially metallized SiC wafers with high quality.
This study demonstrates and discusses a novel approach for the fabrication and rapid prototyping of monolithic photonic platforms comprising a ridge-type waveguide with integrated sensing structures. First, the bulk injection-molded cyclic olefin copolymer substrates are micromilled in order to define the physical extension of the ridge structure. Cross-sections down to 30 × 30 µm2, exhibiting a mean surface roughness of 300 nm, are achieved with this process. Subsequently, UV radiation is used to modify the ridge structure’s refractive index, which leads to the formation of an optical waveguide. By employing a phase mask, it is possible to equip the photonic platform with a Bragg grating suitable for temperature measurements with a sensitivity of −5.1 pm K-1. Furthermore, an integrated Fabry-Pérot cavity, generated during the micromilling step as well, enables refractive index measurements with sensitivities up to 1154 nm RIU-1.
This contribution demonstrates and discusses electrically tunable polymer planar Bragg gratings based on bulk cyclic olefin copolymers. A lithographic single-writing-step method and femtosecond laser reductive sintering of copper(II) oxide nanoparticles are subsequently employed in order to generate buried photonic structures and copper conducting paths on top of the polymer substrate. This way, the necessary number of process steps for fabricating a planar polymer-based electro-optical device is greatly reduced. The response of a fully electrified grating structure follows temperature changes, induced by the copper conducting path, with sensitivities up to −31 pm K−1. Dilatometric measurements show that the specimen's behavior is correlated to the situationally reduced thermal expansion of the bulk polymer substrate. In consequence, the tuning response of the photonic platform follows a second order polynomial, whereas a direct current of 30 mA, which correlates to a power consumption of 18.3 mW, leads to a local temperature increase and a residual Bragg wavelength shift of 19.6 K and −547 pm, respectively. Moreover, the outstanding flexibility of the proposed fabrication concept is underlined by demonstrating alternative conducting path geometries, whereas one of the additional designs is adapted to control the spectral width of the Bragg grating's reflection peak.
Microneedle-based microfluidic systems have a great potential to become well-accepted medical devices for simple, accurate, and painless drug delivery and lab-on-a-chip diagnostics. In this work, we report on a novel hybrid approach combining femtosecond direct laser written microneedles with femtosecond laser generated microfluidic channels providing an important step towards versatile medical point-of-care systems. Hollow microneedle arrays are fabricated by a laser system designed for two-photon polymerization applications. Compression tests of two different types of truncated cone-shaped microneedle arrays prepared from OrmoComp® give information about the microneedle mechanical strength, and the results are compared to skin insertion forces. Three-dimensional microchannels are directly created inside PMMA bulk material by an ultrashort pulse laser system with vertical channels having adjustable cross-sectional areas, which allow attaching of microneedles to the microfluidic system. A comprehensive parameter study varying pulse duration and repetition rate is performed on two-photon polymerization to identify an optimal laser power range for fabricating microneedles using the same pulse duration and repetition rate as for microchannels. This addresses the advantage of a single laser system process that overcomes complex fabrication methods. A proof of concept flow test with a rhodamine B dye solution in distilled water demonstrates that the combination of microneedles and microchannels qualifies for microfluidic injection and extraction applications.
This paper presents an optimized laser-bonding process for piezoelectric energy-harvesters based on thin fluorinated-ethylene-propylene (FEP) foils, using an ultra-short-pulse(USP) laser. Due to the minimized thermal stress in the material during bonding, achieved bypulse durations of few picoseconds, we created seams down to 40μm width without generatingholes in the 12.5μm thick FEP-foils. Using a galvanometer scanning system allowed for fastbonding-speed up to several centimeters per second, making the process also suitable for largestructures and areas. The achieved bond strength of the seams under influence of shearingstress was examined using tensile testing, which showed a sufficient strength of about 25 % of the maximum strength of an unbonded, single layer of FEP.
This contribution reviews recent advancements, current research and possible applications of polymer planar Bragg grating (PPBG) sensors with a focus on the utilization of cyclic olefin copolymer (COC) substrates. COC-PPBGs can be handled and fabricated efficiently by employing a single writing step procedure which features simultaneous generation of waveguide and Bragg grating structure within an injection molded substrate. The resulting photonic structures exhibit an attenuation as low as 1.2 dB cm-1 and a reflectivity up to 99 %. The potential of COC-PPBGs for high-temperature applications is proven by demonstrating temperature measurements up to 160 °C. Moreover, it is possible to employ single PPBGs for multidimensional stress and strain sensing or even three-dimensional shape reconstruction. Due to their excellent properties, it is feasible to integrate COC-PPBGs into commercial-grade carbon fiber reinforced polymer workpieces for structural health monitoring. Furthermore, utilization of appropriate coatings enables functionalization of PPBGs for refractive index sensing and thus biochemical applications. Beside the fabrication and characterization of COC-based PPBGs, this contribution exemplifies and reviews such applications.
We report on laser direct generation of 3D-microchannels for microfluidic applications inside PMMA bulk material by focused femtosecond pulses. Inner lying channels with cross sectional areas from 100 µm2 to 4400 µm2 are directly created in the volume of a PMMA substrate. Using the presented process, the channel length is fundamentally unlimited. Here we demonstrate a channel length of 6 meters inside a substrate with dimensions of 20 × 20 × 1.1 mm. The formation of the micro channels is based on nonlinear absorption around the focal volume that triggers a material modification. The modified volume can be selectively opened to form the channel by a subsequent annealing process. The cross section of the channel is strongly influenced by the energy distribution and illumination around the focal volume determined by the optical setup and process design. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stage, allowing freely chosen complex shaped channel architectures. Within a comprehensive parameter study, varying laser power, number of multi-passes, writing speed and writing depths, we identify an optimized process in terms of attainable channel height, width and aspect ratio, as well as process stability and reproducibility. The proof of concept for an application in three dimensional microfluidic systems is provided by florescence microscopy using a dye rhodamine B solution in isopropanol.
The authors report on the laser generation of three-dimensional microchannel architectures with fundamentally unlimited channel length by focused 514 nm femtosecond laser pulses inside polymethylmethacrylate bulk material. The three-dimensional channel layout is implemented by moving the specimen using three-dimensional motorized stages, allowing freely chosen complex shaped channel architectures. Based on nonlinear absorption of high intensities around the focal volume, a material modification, including a refractive-index shift is triggered. After laser exposure, the channel is created by a gaseous degradation of exposed areas during an annealing process. Cross section and aspect ratio of thus generated microchannels are strongly influenced by the numerical aperture of the applied objective. To obtain a circular cross-sectional shape, high focusing objectives are necessary. In this report, the authors improve the existing setup by using an elliptical input beam, transforming the intensity distribution of the focal area in the propagation direction to a circular shape even for low and medium numerical aperture focusing objectives and therefore avoiding a small working distance as a limiting factor for processing depth. The elliptical input beam is obtained by insertion of a slit mask in front of the focusing objective. The ellipticity of the incident beam defines the aspect ratio of the generated microchannels. Furthermore, the size of internal microchannels is adjustable by varying laser and annealing process parameters.
We report on laser generation of microchannels by focused femtosecond laser pulses inside PMMA bulk material. This process enables direct fabrication of three dimensional microfluidic channel architectures with generally unlimited channel length. Based on nonlinear ultrashort pulse laser absorption of high intensities around the focal volume, a material modification including a refractive index shift is triggered. After laser exposure the channel is created by a gaseous degradation of exposed areas during an annealing process. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stages, allowing freely chosen complex shaped channel architectures. In this report, the creation of inner lying vertical microchannels is examined. In addition to previously shown horizontal channel architectures vertical channels are necessary to fulfill the definition of an internal three-dimensional microfluidic structure and to create interconnections in multilevel lab on chip devices. The cross section and geometry of vertical channels are strongly influenced by laser parameters such as pulse duration, laser power and writing speed. The influence of these process parameters on the channels diameter is determined and parameters are optimized regarding a controllable, stable and reproducible process. The functionality of vertical microchannels as an interconnection between multilayer microfluidic devices is demonstrated using a Rhodamine B solution.
Control of femtosecond laser generated microfluidic channels inside poly (methyl methacrylate)
(2018)
In this study, the authors report on femtosecond laser direct generation of microchannels inside poly(methyl methacrylate) with variable dimensions ranging from a channel height of 20 to 350 μm and an aspect ratio down to 1.2. Focused ultrashort laser pulses are used to trigger a material modification in the focal area which can be selectively opened by a subsequent annealing process. A 3D microchannel architecture can easily be realized by moving the specimen using motorized stages, allowing freely chosen complex shaped channel layouts. While the laser wavelength is identified as one of the main parameters determining process effectiveness, another core of this study is the variation of channel dimensions by the numerical aperture of the applied objective to focus the laser. The authors find that both size and shape of the modified region and the resulting microchannel can be controlled by altering the numerical aperture.
We report on the joining of transparent thermoplastic polymers using infrared femtosecond laser pulses. Due to nonlinear absorption, the developed micro-welding process for cyclo-olefin copolymers does not require any intermediate absorbing layers or any surface pre-processing of the welding partners. In view of an optimized and stable micro-welding process, the influence of the welding speed and focal position on both, the quality and shear force strength are investigated. We highlight that welding seam widths of down to 65 µm are feasible for welding speeds of up to 75 mm/s. However, a variation of the welding speed affects the required focal position for a successful joining process. The shear force strength of the welding seam is determined to 37 MPa, which corresponds to 64% of the shear strength of the bulk material and is not affected by the welding speed.
Based on nonlinear absorption, we report on laser welding of cycloolefin copolymers without any additional absorption layer employing infrared femtosecond laser. To the best of our knowledge, this is the first report of ultrashort laser welding of this material class, revealing a remarkable high processing speed of 20 mm/s in a single pass mode. Using a 1028 nm laser having a pulse duration of 220 fs at a repetition rate of 571 kHz leads to a welding seam width between 38 and 137 μm, depending on the applied laser average power. The welded joint is characterized by a maximum shear strength of 40 MPa. The experimental results are compared to those reported for femtosecond laser welding of PMMA and to those published for using a Thulium fiber laser.
Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability.
The laser beam welding of transparent plastic components is still a challenge
according to the state of the art. A new approach for the joining of two transparent
polymeric components using ultrashort laser beam pulses is presented in
this report. In this respect, the high peak pulse intensity associated with these
lasers permits non-linear absorption processes and thus the production of a
locally well-defined heat source in the interior even of a transparent material or
at the boundary layer between two transparent substrates. Welding results for
transparent plastics of the cycloolefin copolymer and polycarbonate types are
shown in this study. In addition to the investigation into the influences of fundamental
process parameters on the weld geometry, the leak tightness is
demonstrated in this study using a microfluidic system.
We report on a femtosecond laser based fabrication technique that enables simultaneous single-step generation of optical waveguides and Bragg gratings inside bulk cyclic olefin copolymers. Due to the nonlinear absorption of focused and spatially modulated laser radiation with a wavelength of 514 nm and a pulse duration of 450 fs, a modification concluding a refractive index shift increase inside the substrate can be achieved. A sophisticated characterization of the generated waveguides by means of an elaborate cut-back method reveals a maximum attenuation of 3.2 dB/cm. Additionally, a Mach-Zehnder interferometer is used to examine the waveguide’s refractive index profile. The integrated Bragg grating structures exhibit reflectivities up to 95 % and a spectral full width at half maximum of 288 pm, at a Bragg wavelength of 1582 nm, whereas the grating period can be deliberately chosen by adapting the fabrication parameters. Thus, due to its increased flexibility and the resulting dispensability of cost-intensive phase masks, this method constitutes an especially promising fabrication process for polymer Bragg gratings inside of bulk materials.