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Multilayers of silicon oxide/silicon nitride/silicon oxide (ONO) are known for their good
electret properties due to deep energy traps near the material interfaces, facilitating charge
storage. However, measurement of the space charge distribution in such multilayers is a
challenge for conventional methods if layer thickness dimensions shrink below 1 μm. In this
paper, we propose an atomic force microscope based method to determine charge distributions in
ONO layers with spatial resolution below 100 nm. By applying Kelvin probe force microscopy
(KPFM) on freshly cleaved, corona-charged multilayers, the surface potential is measured
directly along the z-axis and across the interfaces. This new method gives insights into charge
distribution and charge movement in inorganic electrets with a high spatial resolution.
Analysis of electrophysiological characteristics of cardiomyocytes following radiation exposure
(2012)