Ultrashort pulsed laser backside ablation of fused silica
Author: | Simon Schwarz, Stefan RungORCiD, Cemal Esen, Ralf HellmannORCiD |
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Parent Title (German): | Optics Express |
Document Type: | Article |
Language: | German |
Year of Completion: | 2021 |
Release Date: | 2021/09/20 |
GND Keyword: | Femtosekundenlaser; Quarzglas; Mikrobearbeitung |
Volume: | 29 |
Issue: | 15 |
First Page: | 23477 |
Last Page: | 23486 |
Urheberrecht: | 0 |
research focus : | Intelligent Systems / Intelligent Sensors and Signals |
Materials / Innovative Material Processing | |
Licence (German): | Keine Lizenz - es gilt das deutsche Urheberrecht |