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Lateral thermal stability modulation for the definition of InGaAs/InP wires
- We have investigated a novel technique for the definition of semiconductor wires. By the selective local removal of the InP top barrier layer wire patterns in which the top material varies between InP and InGaAs are formed from an InGaAs/InP quantum well. In a subsequent annealing step the top InGaAs layer shows substantially stronger interdiffusion than the InP covered regions (wires). By using luminescence spectroscopy we show that this defectfree enhanced interdiffusion can be used to obtain a lateral energy barrier.
Author: | John Oschinowo, Alfred Forchel, Jörg Dreybrodt, Monika Emmerling, Imre Gyuro, Peter Speier, Detlev Grützmacher, Manfred StollenwerkORCiD |
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Parent Title (English): | Microelectronic Engineering |
Document Type: | Article |
Language: | English |
Year of Completion: | 1992 |
Release Date: | 2019/10/24 |
GND Keyword: | Indiumarsenid; Galliumarsenid |
Volume: | 17 |
Issue: | 1–4 |
First Page: | 505 |
Last Page: | 508 |
Urheberrecht: | 0 |
research focus : | Materials / Innovative Material Processing |
Materials / Material Testing & Sensor Technology | |
Licence (German): |