The heterogeneous nature of deposits from hexamethyldisiloxane/oxygen plasmas
Author: | Morgan Alexander, Robert Short, Frank Jones, Manfred StollenwerkORCiD, Gerd Mathar, Jochen Zabold, Walter Michaeli |
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Parent Title (English): | Ceramic films and coatings |
Document Type: | Article |
Language: | English |
Year of Completion: | 1995 |
Release Date: | 2019/10/16 |
GND Keyword: | Hexamethyldisiloxan; Sauerstoff; Plasma |
Volume: | 1995 |
Issue: | 54 |
First Page: | 87 |
Last Page: | 99 |
Urheberrecht: | 0 |
research focus : | Materials / Innovative Material Processing |
Materials / Material Testing & Sensor Technology | |
Licence (German): |