Smoothing of interfaces in ultrathin Mo-Si multilayers by ion bombardment
Author: | Andreas Kloidt, Hans-Jürgen Stock, Ulf Kleineberg, Thorsten DöhringORCiD, Michael Pröpper, Bernt Schmiedeskamp, Ulrich Heinzmann |
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Parent Title (English): | Thin Solid Films |
Document Type: | Article |
Language: | English |
Year of Completion: | 1993 |
Release Date: | 2019/07/10 |
GND Keyword: | Dünne Schicht; Oberflächenphysik |
Volume: | 228 |
Issue: | 1-2 |
First Page: | 154 |
Last Page: | 157 |
Urheberrecht: | 0 |
research focus : | Materials / Innovative Material Processing |
Materials / Material Testing & Sensor Technology | |
Licence (German): | Keine Lizenz - es gilt das deutsche Urheberrecht |