- Piezoelectrets fabricated from fluoroethylenepropylene (FEP)-foils have shown drastic increase of their piezoelectric
properties during the last decade. This led to the development of FEP-based energy harvesters, which are about to evolve
into a technology with a power-generation-capacity of milliwatt per square-centimeter at their resonance frequency. Recent
studies focus on piezoelectrets with solely negative charges, as they have a better charge stability and a better suitability for
implementation in rising technologies, like the internet of things (IOT) or portable electronics. With these developments
heading towards applications of piezoelectrets in the near future, there is an urgent need to also address the fabrication
process in terms of scalability, reproducibility and miniaturization. In this study, we firstly present a comprehensive review
of the literature for a deep insight into the research that has been done in the field of FEP-based piezoelectrets. For the first
time, we propose the employment of microsystem-technology and present a process for the fabrication of thermoformed
FEP piezoelectrets based on thermoforming SU-8 templates. Following this process, unipolar piezoelectrets were fabri� cated with air void dimensions in the range of 300–1000 lm in width and approx. 90 lm in height. For samples with a void
size of 1000 lm, a d33-coefficient up to 26,508 pC/N has been achieved, depending on the applied seismic mass. Finally,
the properties as energy harvester were characterized. At the best, an electrical power output of 0.51 mW was achieved for
an acceleration of 1 � g with a seismic mass of 101 g. Such piezoelectrets with highly defined dimensions show good
energy output in relation to volume, with high potential for widespread applications.